公开(公告)号：US06352626B1

公开(公告)日：2002-03-05

申请号：US09550360

申请日：2000-04-19

Applicant: Heimart von Zweck

Inventor： Heimart von Zweck

IPC: C23C1434

CPC classification number: H01J37/08 ,  H01J27/20 ,  H01J2237/081

Abstract: The present invention relates to an improved ion source comprising a magnetron and cathode in a first housing and a cold cathode in a second housing. The second housing generally comprises a Penning cell to collimate an ion beam arising from the first housing. This arrangement provides an ion source capable of ejecting sputtered ions of the cold cathode magnetron discharge into a highly collimated, positive ion beam having low emittance angles. The invention also provides a cold cathode target for use in an ion source, and in particular, to an ion source having single or multiple targets of desired materials and/or dimensions to provide a rich source of boron ions in a manner allowing operation of the ion source free of producing significant toxic effects or corrosion. The invention also relates to a cold cathode target comprising a boron-containing material selected from the group consisting of a boron alloy, a boride, and mixtures thereof. The invention also relates to ion sources which comprise a single solid cathode disc or a multiple or array of solid cathode discs, or having a bore through on axis, in which the cathode is made of conductive materials such as metals, alloys and metal compounds. Example materials include indium, aluminum and indium phosphide. The ion source can be a source of positive gas ions.

Abstract translation: 本发明涉及一种改进的离子源，其包括第一壳体中的磁控管和阴极以及第二壳体中的冷阴极。 第二壳体通常包括用于准直由第一壳体产生的离子束的Penning单元。 这种布置提供了能够将冷阴极磁控管放电的溅射离子喷射到具有低发射角的高准直正离子束的离子源。 本发明还提供了一种用于离子源的冷阴极靶，特别是涉及具有所需材料和/或尺寸的单个或多个靶的离子源，以提供丰富的硼离子源，使得 离子源不产生显着的毒性作用或腐蚀。 本发明还涉及包含选自硼合金，硼化物及其混合物的含硼材料的冷阴极靶。 本发明还涉及离子源，其包括单个固体阴极盘或多个或阵列的固体阴极盘，或具有穿过轴的孔，其中阴极由诸如金属，合金和金属化合物的导电材料制成。 示例材料包括铟，铝和磷化铟。 离子源可以是正气体离子的来源。

公开(公告)号：US4096352A

公开(公告)日：1978-06-20

申请号：US742780

申请日：1976-11-18

Applicant: Heimart von Zweck

Inventor： Heimart von Zweck

IPC: H01B17/30

CPC classification number: H01B17/30

Abstract: Electric feedthrough for use in gastight enclosures has a generally cylindrical, molded body with a molded housing head carrying screw-type electrical connections. An O-ring is situated between the head and a nut threaded to mate with the threads on the housing body so that the nut can be screwed up to form a hermetic seal in the barrier wall of an opening. The screw-type terminations are located at radial distances from the center of the body at least as great as the radius of the body passing through the barrier wall.

Abstract translation: 用于气密外壳的电馈通件具有通常为圆柱形的成型体，其具有承载螺旋型电连接的模制外壳头部。 O形环位于头部和螺母之间，螺母被螺纹与壳体上的螺纹配合，使得螺母可以被拧紧以在开口的阻挡壁中形成气密密封。 螺旋型终端位于距身体中心的径向距离处，至少与穿过障壁的身体的半径一样大。