THREE-AXIS MAGNETIC SENSOR AND METHOD FOR MANUFACTURING THE SAME
    6.
    发明申请
    THREE-AXIS MAGNETIC SENSOR AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    三轴磁传感器及其制造方法

    公开(公告)号:US20120268113A1

    公开(公告)日:2012-10-25

    申请号:US13517526

    申请日:2012-06-13

    IPC分类号: G01R33/09 G01R3/00

    摘要: In a three-axis magnetic sensor, a plurality of magnetoresistive effect element bars are connected in series by means of bias magnets formed on a flat surface parallel to the flat surface of the substrate to constitute magnetoresistive effect elements. The sensitivity direction of magnetization is a direction perpendicular to the longitudinal direction of each of the magnetoresistive effect element bars. Magnetoresistive effect elements forming X-axis and Y-axis sensors have magnetization directions that are orthogonal to each other. Magnetoresistive effect elements of the Z-axis sensor are formed on a tilted surface substrate in such a way that the magnetization direction is inside the tilted surface. The sensitivity direction of the Z-axis sensor is perpendicular to the longitudinal direction of the magnetoresistive effect element bar.

    摘要翻译: 在三轴磁传感器中,多个磁阻效应元件棒通过形成在平行于基板的平坦表面的平坦表面上的偏置磁铁串联连接,以构成磁阻效应元件。 磁化的灵敏度方向是垂直于每个磁阻效应元件棒的纵向的方向。 形成X轴和Y轴传感器的磁阻效应元件具有彼此正交的磁化方向。 Z轴传感器的磁阻效应元件形成在倾斜表面基板上,使得磁化方向在倾斜表面内。 Z轴传感器的灵敏度方向垂直于磁阻效应元件棒的纵向方向。

    Three-Axis Magnetic Sensor and Method for Manufacturing the Same
    7.
    发明申请
    Three-Axis Magnetic Sensor and Method for Manufacturing the Same 审中-公开
    三轴磁传感器及其制造方法

    公开(公告)号:US20090027048A1

    公开(公告)日:2009-01-29

    申请号:US11908549

    申请日:2006-03-17

    IPC分类号: G01R33/09 G01R3/00

    摘要: In the three-axis magnetic sensor of the present invention, a plurality of magnetoresistive effect element bars are connected in series by means of bias magnets to constitute magnetoresistive effect elements, and magnetoresistive effect elements of the X-axis sensor and those of the Y-axis sensor are formed on a flat surface parallel to the flat surface of the substrate. The sensitivity direction of magnetization is a direction vertical to the longitudinal direction of each of the magnetoresistive effect element bars, and magnetoresistive effect elements of the X-axis sensor and those of the Y-axis sensor are formed in such a way that the magnetization directions are orthogonal to each other. Further, magnetoresistive effect elements of the Z-axis sensor are formed on a tilted surface of the projection projected from the flat surface of the substrate in such a way that the magnetization direction is inside the tilted surface. The Z-axis sensor is provided in such a way that the sensitivity direction is vertical to the longitudinal direction of the magnetoresistive effect element bar.

    摘要翻译: 在本发明的三轴磁传感器中,多个磁阻效应元件棒通过偏置磁铁串联连接,构成磁阻效应元件,X轴传感器和Y轴传感器的磁阻效应元件, 轴传感器形成在平行于基板的平坦表面的平坦表面上。 磁化的灵敏度方向是垂直于每个磁阻效应元件棒的纵向的方向,并且X轴传感器和Y轴传感器的磁阻效应元件以这样的方式形成,使得磁化方向 彼此正交。 此外,Z轴传感器的磁阻效应元件形成在从基板的平坦表面突出的突起的倾斜表面上,使得磁化方向在倾斜表面内。 Z轴传感器以灵敏度方向垂直于磁阻效应元件棒的纵向的方式设置。