公开(公告)号：US20120217962A1

公开(公告)日：2012-08-30

申请号：US13466887

申请日：2012-05-08

申请人： Hideto ANDO ,  Shinji SUGIHARA ,  Fumihito KOIKE ,  Kota ASATSUMA

发明人： Hideto ANDO ,  Shinji SUGIHARA ,  Fumihito KOIKE ,  Kota ASATSUMA

IPC分类号： G01R33/09 ,  B05D3/00 ,  B05D5/00

CPC分类号： G01R33/093 ,  B82Y25/00 ,  H01L43/08 ,  H01L43/12

摘要： A magnetic sensor having no sensitivity differences between sensitivity axes, and an easy manufacturing method therefor are provided. The method includes a process of forming first stacked films for a magnetoresistive element on a substrate. This element has a sensitivity axis in a certain direction and includes a self-pinned ferromagnetic pinned layer in which first and second ferromagnetic films are antiferromagnetically coupled through an antiparallel coupling layer, a nonmagnetic intermediate layer, and a soft magnetic free layer. The method further includes a process of removing a region of the first stacked films from the substrate. The remaining region of the films includes at least a region to be left to form the element. The method furthermore includes a process of forming second stacked films for a magnetoresistive element, which has a sensitivity axis in a direction different from the certain direction and has the same structure, on the exposed substrate.

摘要翻译： 提供了灵敏度轴之间没有灵敏度差的磁传感器及其制造方法。 该方法包括在基板上形成用于磁阻元件的第一层叠膜的工艺。 该元件在一定方向上具有灵敏度轴，并且包括自身固定的铁磁性钉扎层，其中第一和第二铁磁性膜通过反平行耦合层，非磁性中间层和软磁性层反铁磁耦合。 该方法还包括从衬底去除第一层叠膜的区域的工艺。 膜的剩余区域至少包括要形成元件的区域。 该方法还包括在暴露的基板上形成具有与某一方向不同的方向并且具有相同结构的灵敏度轴的用于磁阻元件的第二叠层膜的工艺。

公开(公告)号：US20120200292A1

公开(公告)日：2012-08-09

申请号：US13446264

申请日：2012-04-13

申请人： Shinji SUGIHARA ,  Fumihito KOIKE ,  Yasushi WATANABE ,  Hideto ANDO

发明人： Shinji SUGIHARA ,  Fumihito KOIKE ,  Yasushi WATANABE ,  Hideto ANDO

IPC分类号： G01R33/09

CPC分类号： H01L43/08 ,  B82Y25/00 ,  G01R33/0206 ,  G01R33/093

摘要： A magnetic sensor includes magnetoresistive elements and a soft magnetic body. The magnetoresistive elements have multi layers including a magnetic layer and a nonmagnetic layer on a substrate, and exert a magnetoresistance effect. The soft magnetic body is electrically disconnected with the magnetoresistive elements, and converts a vertical magnetic field component from the outside into a magnetic field component in a horizontal direction so as to provide the magnetoresistive elements with the horizontally converted magnetic field component. The magnetoresistive elements have a pinned magnetic layer having a fixed magnetization direction and a free magnetic layer having a variable magnetization direction. The free magnetic layer is stacked on the pinned magnetic layer with a nonmagnetic layer interposed between the free magnetic layer and the pinned magnetic layer. The magnetization directions of the pinned magnetic layers of the magnetoresistive elements are the same direction. The magnetoresistive elements form a bridge circuit.

摘要翻译： 磁传感器包括磁阻元件和软磁体。 磁阻元件具有包括基板上的磁性层和非磁性层的多层，并施加磁阻效应。 软磁体与磁阻元件电气断开，并将来自外部的垂直磁场分量在水平方向上转换成磁场分量，从而为磁阻元件提供水平转换的磁场分量。 磁阻元件具有固定磁化方向的固定磁性层和具有可变磁化方向的自由磁性层。 自由磁性层被叠置在被钉扎的磁性层上，其中非磁性层介于自由磁性层和被钉扎的磁性层之间。 磁阻元件的钉扎磁性层的磁化方向是相同的方向。 磁阻元件形成桥接电路。

公开(公告)号：US20120217961A1

公开(公告)日：2012-08-30

申请号：US13465954

申请日：2012-05-07

申请人： Hideto ANDO ,  Shinji SUGIHARA ,  Takafumi NOGUCHI

发明人： Hideto ANDO ,  Shinji SUGIHARA ,  Takafumi NOGUCHI

IPC分类号： G01R33/02

CPC分类号： G01R33/093 ,  B82Y25/00 ,  H01L43/08

摘要： A magnetic sensor includes a plurality of magnetoresistance effect elements and soft magnetic bodies. Each of the magnetoresistance effect elements is formed by stacking a magnetic layer and a non-magnetic layer on a substrate so as to exhibit a magnetoresistance effect. The magnetoresistance effect element is configured such that element portions and electrode layers are alternately disposed. A soft magnetic body is disposed on one and the other sides of each of the element portions in the Y direction, and the soft magnetic bodies are displaced from each other in the X direction. With this arrangement, an external magnetic field applied in the X1 direction is changed into an external magnetic field in the Y direction when passing through the soft magnetic bodies, and the changed external magnetic field flows into the element portions.

摘要翻译： 磁传感器包括多个磁阻效应元件和软磁体。 通过在基板上层叠磁性层和非磁性层来形成磁阻效应元件，以显现出磁阻效应。 磁电阻效应元件被配置为使得元件部分和电极层交替设置。 在Y方向上的每个元件部分的一侧和另一侧设置软磁体，并且软磁体在X方向上彼此偏移。 通过这样的结构，在X1方向上施加的外部磁场在通过软磁体时变为Y方向的外部磁场，并且变化的外部磁场流入元件部。

公开(公告)号：US20090214104A1

公开(公告)日：2009-08-27

申请号：US12390619

申请日：2009-02-23

申请人： Shinji SUGIHARA

发明人： Shinji SUGIHARA

IPC分类号： G06K9/00 ,  G06K9/62

CPC分类号： G06T7/001 ,  G03F1/84 ,  G06T2207/10061 ,  G06T2207/30148

摘要： The present invention provides an apparatus and method for correcting an inspection reference pattern image in order to properly inspect a pattern image of a specimen. The pattern image correcting apparatus is characterized by including: a first pattern synthesizing unit for synthesizing an assist pattern image and a pattern image to be inspected, thereby generating a pattern image to be inspected with an assist pattern; an assist pattern shift processor; a second pattern synthesizing unit for synthesizing the shifted assist pattern image and the inspection reference pattern image, thereby generating an inspection reference pattern image with an assist pattern; a model generating unit for generating a position shift model by using the pattern image to be inspected with the assist pattern and the inspection reference pattern image with the assist pattern; and a correction pattern image computing unit for correcting the inspection reference pattern image.

摘要翻译： 本发明提供了一种用于校正检查参考图案图像以便适当地检查样本的图案图像的装置和方法。 图案图像校正装置的特征在于包括：第一图案合成单元，用于合成辅助图案图像和待检查的图案图像，由此产生用辅助图案检查的图案图像; 辅助图案移位处理器; 第二图案合成单元，用于合成移动的辅助图案图像和检查基准图案图像，从而生成具有辅助图案的检查参考图案图像; 模型生成单元，用于通过利用辅助图案使用要检查的图案图像和具有辅助图案的检查基准图案图像来生成位置偏移模型; 以及校正图案图像计算单元，用于校正检查基准图案图像。