公开(公告)号：US20040156049A1

公开(公告)日：2004-08-12

申请号：US10364006

申请日：2003-02-10

Applicant: Hinds Instruments, Inc.

Inventor： Andrew H. Breninger ,  Christopher O. Griffiths ,  Douglas C. Mark ,  Artemiy Mikheyev ,  Baoliang Wang

IPC: G02B001/00 ,  G01J004/00

CPC classification number: G02B27/0006 ,  G01J1/02 ,  G01J1/0252 ,  G01N21/23 ,  G03F7/70933

Abstract: Purging of a light beam path in an effective manner that minimizes the affect of the purging requirement on system throughput. In one embodiment, the invention is incorporated into a birefringence measurement system that has several components for directing light through a sample optical element and thereafter detecting and analyzing the light. The segment of the beam path through the sample is isolated to reduce the volume that requires continual purging.

Abstract translation: 以有效的方式清除光束路径，以最大限度地减少净化需求对系统吞吐量的影响。 在一个实施例中，本发明被并入双折射测量系统中，该系统具有多个用于将光引导通过样品光学元件的组件，然后检测和分析光。 通过样品的光束路径的段被隔离以减少需要连续吹扫的体积。