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公开(公告)号:US20040075834A1
公开(公告)日:2004-04-22
申请号:US10359529
申请日:2003-02-05
IPC分类号: G01J004/00
CPC分类号: G01N21/23 , G01N2021/9513 , G01N2201/101 , G01N2201/103
摘要: The disclosure is directed to systems and methods for precisely measuring birefringence properties of large-format samples of optical elements. A gantry-like configuration is employed for precise movement of birefringence measurement system components relative to the sample. There is also provided an effective large-format sample holder that adequately supports the sample to prevent induced birefringence therein while still presenting a large area of the sample to the unhindered passage of light.
摘要翻译: 本公开涉及用于精确测量大幅面光学元件样品的双折射性质的系统和方法。 双折射测量系统部件相对于样品的精确运动采用了龙门式结构。 还提供了一种有效的大幅面样品保持器,其充分地支撑样品以防止其中引起的双折射,同时仍然将大面积的样品呈现给无阻碍的光通过。
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公开(公告)号:US20040156049A1
公开(公告)日:2004-08-12
申请号:US10364006
申请日:2003-02-10
发明人: Andrew H. Breninger , Christopher O. Griffiths , Douglas C. Mark , Artemiy Mikheyev , Baoliang Wang
IPC分类号: G02B001/00 , G01J004/00
CPC分类号: G02B27/0006 , G01J1/02 , G01J1/0252 , G01N21/23 , G03F7/70933
摘要: Purging of a light beam path in an effective manner that minimizes the affect of the purging requirement on system throughput. In one embodiment, the invention is incorporated into a birefringence measurement system that has several components for directing light through a sample optical element and thereafter detecting and analyzing the light. The segment of the beam path through the sample is isolated to reduce the volume that requires continual purging.
摘要翻译: 以有效的方式清除光束路径,以最大限度地减少净化需求对系统吞吐量的影响。 在一个实施例中,本发明被并入双折射测量系统中,该系统具有多个用于将光引导通过样品光学元件的组件,然后检测和分析光。 通过样品的光束路径的段被隔离以减少需要连续吹扫的体积。
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