公开(公告)号：US20120055788A1

公开(公告)日：2012-03-08

申请号：US13297920

申请日：2011-11-16

申请人： Hirohisa TAKAHASHI ,  Sadayuki Ukishima ,  Atsushi Ota ,  Noriaki Tani ,  Satoru Ishibashi

发明人： Hirohisa TAKAHASHI ,  Sadayuki Ukishima ,  Atsushi Ota ,  Noriaki Tani ,  Satoru Ishibashi

IPC分类号： C23C14/08 ,  C23C14/34

CPC分类号： C23C14/3414 ,  C23C14/086 ,  C23C14/5806

摘要： A transparent electroconductive film having a low resistivity is provided. In a film-forming method of the present invention, a transparent electroconductive film is formed on a surface of a substrate by sputtering, in a vacuum atmosphere, a target in which ZnO is a main component and Al2O3 and TiO2 are added to ZnO, and then the transparent electroconductive film is annealed by the heating thereof at a temperature of 250° C. or more and 400° C. or less. The resistivity of the obtained transparent electroconductive film is reduced because the film has ZnO as the main component and Al and Ti added therein. The transparent electroconductive film formed by the present invention is suitable as a transparent electrode for the FDP, etc.

摘要翻译： 提供具有低电阻率的透明导电膜。 在本发明的成膜方法中，在真空气氛中，通过溅射在基板的表面上形成透明导电膜，其中ZnO作为主要成分，并将Al 2 O 3和TiO 2加入到ZnO中， 然后通过在250℃以上且400℃以下的温度下的加热对透明导电膜进行退火。 所得到的透明导电膜的电阻率降低，因为膜以ZnO为主要成分，并添加了Al和Ti。 由本发明形成的透明导电膜适合作为FDP等的透明电极。

公开(公告)号：US20100295811A1

公开(公告)日：2010-11-25

申请号：US12814039

申请日：2010-06-11

申请人： Hirohisa TAKAHASHI ,  Satoru Ishibashi ,  Noriaki Tani ,  Sadayuki Ukishima ,  Satoru Takasawa ,  Kyuzo Nakamura ,  Haruhiko Yamamoto

发明人： Hirohisa TAKAHASHI ,  Satoru Ishibashi ,  Noriaki Tani ,  Sadayuki Ukishima ,  Satoru Takasawa ,  Kyuzo Nakamura ,  Haruhiko Yamamoto

IPC分类号： G06F3/041

CPC分类号： G06F3/045

摘要： A touch panel having high durability is provided. Either one or both of a display device and a flexible panel have island-shaped protective bodies formed on surfaces of electrode layers (upper electrode layer, lower electrode layer), and a transparent conductive film is exposed between the protective bodies. Since the protective bodies protrude highly from the surface of the transparent conductive film, when the flexible panel is pressed and the upper electrode and the lower electrode layer are brought into contact, a load to be applied to the transparent conductive film is reduced by the protective bodies, so that the transparent conductive film is not broken.

摘要翻译： 提供了具有高耐久性的触摸面板。 显示装置和柔性面板中的任一个或两者具有形成在电极层（上电极层，下电极层）的表面上的岛状保护体，并且在保护体之间露出透明导电膜。 由于保护体从透明导电膜的表面突出高度突出，当按压柔性面板并使上部电极和下部电极层接触时，通过保护性 使透明导电膜不破裂。

公开(公告)号：US20090173945A1

公开(公告)日：2009-07-09

申请号：US12364836

申请日：2009-02-03

申请人： Satoru TAKASAWA ,  Masaki TAKEI ,  Hirohisa TAKAHASHI ,  Hiroaki KATAGIRI ,  Sadayuki UKISHIMA ,  Noriaki TANI ,  Satoru ISHIBASHI ,  Tadashi MASUDA

发明人： Satoru TAKASAWA ,  Masaki TAKEI ,  Hirohisa TAKAHASHI ,  Hiroaki KATAGIRI ,  Sadayuki UKISHIMA ,  Noriaki TANI ,  Satoru ISHIBASHI ,  Tadashi MASUDA

IPC分类号： H01L29/786 ,  C23C14/34 ,  H01L23/48

CPC分类号： H01L29/41733 ,  C23C14/185 ,  C23C14/3407 ,  C23C14/5806 ,  H01L21/2855 ,  H01L21/76843 ,  H01L21/76877 ,  H01L23/53238 ,  H01L27/124 ,  H01L29/42384 ,  H01L29/458 ,  H01L29/4908 ,  H01L2924/0002 ,  H01L2924/12044 ,  H01L2924/00

摘要： A conductive film having high adhesion and low specific resistance is formed. A target containing copper as a main component is sputtered in vacuum ambience while an oxygen gas introduced, and then, a conductive film containing copper as a main component and additive metals, such as Ti or Zr, is formed. Such a conductive film has high adhesion to a silicon layer and a glass substrate and is hardly peeled off from the substrate. Furthermore, the specific resistance is low and the contact resistance to a transparent conductive film is also low. Thus, no deterioration in the electric characteristics occurs even when the conductive film is used for an electrode film. Accordingly, the conductive film formed by the present invention suited for TFT, and electrode films and barrier films of semiconductor elements, in particular.

摘要翻译： 形成具有高粘附性和低电阻率的导电膜。 在真空环境中溅射含有铜作为主要成分的靶，同时引入氧气，然后形成以铜为主要成分的导电膜和添加金属如Ti或Zr。 这种导电膜对硅层和玻璃基板具有高粘附性，并且几乎不从基板剥离。 此外，电阻率低，对透明导电膜的接触电阻也低。 因此，即使将导电膜用于电极膜也不会发生电特性的劣化。 因此，特别是适用于TFT的本发明形成的导电膜以及半导体元件的电极膜和阻挡膜。

公开(公告)号：US20100013787A1

公开(公告)日：2010-01-21

申请号：US12567089

申请日：2009-09-25

申请人： Hirohisa TAKAHASHI ,  Satoru Takasawa ,  Isao Sugiura ,  Atsushi Ota ,  Satoru Ishibashi ,  Haruhiko Yamamoto

发明人： Hirohisa TAKAHASHI ,  Satoru Takasawa ,  Isao Sugiura ,  Atsushi Ota ,  Satoru Ishibashi ,  Haruhiko Yamamoto

IPC分类号： G06F3/041 ,  H01R43/00

CPC分类号： G06F3/041 ,  G06F3/045 ,  Y10T29/49117

摘要： A highly durable touch panel is provided. A touch panel according to the present invention includes a deformable flexible panel, and a transparent electrode film containing In2O3 as a primary component and containing Ti is exposed to a surface of a lower electrode film of a display device. Since such a transparent electrode film has a high abrasion resistance as compared to a conventional one (such as, an ITO thin film), the transparent electrode film is neither clouded nor cracked even if the lower electrode film is repeatedly pressed. Therefore, the touch panel according to the present invention is highly durable.

摘要翻译： 提供高度耐用的触摸面板。 根据本发明的触摸面板包括可变形的柔性面板，并且包含In 2 O 3作为主要成分并且含有Ti的透明电极膜暴露于显示装置的下电极膜的表面。 由于这种透明电极膜与以往的透明电极膜相比具有高耐磨性（例如ITO薄膜），所以即使下反射膜反复被压制，透明电极膜也不会发生糊化或者不破裂。 因此，根据本发明的触摸面板是高度耐用的。

公开(公告)号：US20100141878A1

公开(公告)日：2010-06-10

申请号：US12705049

申请日：2010-02-12

申请人： Hirohisa TAKAHASHI ,  Isao SUGIURA ,  Atsushi OHTA ,  Satoru ISHIBASHI

发明人： Hirohisa TAKAHASHI ,  Isao SUGIURA ,  Atsushi OHTA ,  Satoru ISHIBASHI

IPC分类号： G02F1/1335 ,  G02B5/22 ,  B29D11/00 ,  C23C14/34

CPC分类号： G02B5/201 ,  G02F1/133516 ,  G02F1/134336 ,  G02F2202/28

摘要： Exfoliation of an etching stopper is prevented. A color filter of the present invention includes an inorganic protection film (etching stopper) composed mainly of SnO2. Since the inorganic protection film as such not only has a high specific resistance but also has a linear expansion coefficient close to the linear expansion coefficient of a transparent electrode, the inorganic protection film is not exfoliated from the transparent electrode or the resin layer even if an object to be processed is heated. Since the inorganic protection film and the transparent electrode can be formed in the same film forming chamber, the time required to produce the color filter can be shortened as compared to in the conventional technique.

摘要翻译： 防止蚀刻停止层的剥离。 本发明的滤色器包括主要由SnO 2组成的无机保护膜（蚀刻阻挡层）。 由于无机保护膜不仅具有高的电阻率，而且具有接近于透明电极的线性膨胀系数的线性膨胀系数，所以无机保护膜即使在透明电极或树脂层上也不脱离透明电极或树脂层 加工对象物。 由于无机保护膜和透明电极可以形成在相同的成膜室中，所以与常规技术相比可以缩短生产滤色器所需的时间。