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公开(公告)号:US06796181B2
公开(公告)日:2004-09-28
申请号:US10322632
申请日:2002-12-19
申请人: Hiroshi Tanaka , Hiroshi Ishikawa , Osamu Ikata
发明人: Hiroshi Tanaka , Hiroshi Ishikawa , Osamu Ikata
IPC分类号: G01P1509
CPC分类号: G01P15/0922
摘要: An acceleration sensor includes a piezoelectric single-plate having a weight part and a detection part. The piezoelectric single-plate is, for example, an X-cut plate of LiNbO3.
摘要翻译: 加速度传感器包括具有重量部分和检测部分的压电单板。 压电单板例如是LiNbO 3的X切割板。
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公开(公告)号:US06513382B2
公开(公告)日:2003-02-04
申请号:US09834958
申请日:2001-04-16
IPC分类号: G01P1500
CPC分类号: G01P15/097 , G01P15/0915 , G01P15/18
摘要: A small-sized, high detection sensitivity and high performance acceleration sensor having directional or non-directional sensitivity is disclosed. The acceleration sensor is provided with a vibrator having uni-directional polarization and a weight connected to the vibrator. The weight is supported at the position different from the center of gravity of the total body of the vibrator and the weight itself. The vibrator is disposed so that its direction of polarization axis is either consistent or inconsistent with an axis of the torsion of the vibrator.
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公开(公告)号:US07299695B2
公开(公告)日:2007-11-27
申请号:US10924261
申请日:2004-08-24
申请人: Hiroshi Tanaka , Masanori Yachi , Takashi Kato , Hiroshi Ishikawa
发明人: Hiroshi Tanaka , Masanori Yachi , Takashi Kato , Hiroshi Ishikawa
IPC分类号: G01P15/09
CPC分类号: G01P15/09 , G01P15/0915
摘要: An acceleration sensor includes a weight and a vibrator that supports the weight at its center of gravity. When acceleration is applied to the weight, stress equivalent to the applied acceleration is generated in the vibrator. As the vibrator is arranged to support the weight at its center of gravity, a characteristic relationship is observed between the acceleration, such as angular acceleration or translational acceleration, and the size of electric charges and the polarity. By taking advantage of this relationship, different types of acceleration can be easily detected.
摘要翻译: 加速度传感器包括在其重心处支撑重量的重物和振动器。 当对重物施加加速度时,在振动器中产生与施加的加速度相当的应力。 由于振动器被布置成在其重心处支撑重物,所以在诸如角加速度或平移加速度的加速度以及电荷的大小和极性之间观察到特性关系。 通过利用这种关系,可以容易地检测不同类型的加速度。
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公开(公告)号:US20060096379A1
公开(公告)日:2006-05-11
申请号:US11154801
申请日:2005-06-17
申请人: Atsushi Machida , Sumio Yamada , Hiroshi Tanaka , Hisanori Aizawa , Kenji Nagata , Tsutomu Miyashita , Hiroshi Ishikawa
发明人: Atsushi Machida , Sumio Yamada , Hiroshi Tanaka , Hisanori Aizawa , Kenji Nagata , Tsutomu Miyashita , Hiroshi Ishikawa
IPC分类号: G01P15/09
CPC分类号: G01P15/123 , G01P1/006 , G01P15/18
摘要: An acceleration sensor that suppresses fluctuations in the offset voltage and with an enhanced temperature characteristic is provided. The acceleration sensor comprises an weight that is formed in the center of a semiconductor substrate; a frame that is formed at the circumference of the weight; a beam or diaphragm that connects the weight and frame; a detection element that is formed on the beam or diaphragm and which detects bending of the beam or diaphragm that corresponds with the applied acceleration; and a lead that is formed on the beam or diaphragm and which guides the detection output of the detection element to a pad that is provided on the frame, wherein a dummy lead comprising a plurality of dot patterns which are at least electrically independent of the lead formed on the beam or diaphragm is formed on the beam or diaphragm.
摘要翻译: 提供了抑制偏移电压波动和温度特性提高的加速度传感器。 加速度传感器包括形成在半导体衬底的中心的重物; 在该重物的圆周处形成的框架; 连接重量和框架的梁或隔膜; 检测元件,其形成在梁或隔膜上并且检测与所施加的加速度相对应的梁或隔膜的弯曲; 以及形成在所述光束或光阑上并且将所述检测元件的检测输出引导到设置在所述框架上的垫的引线,其中,包括至少电独立于所述引线的多个点图案的虚拟引线 在梁或隔膜上形成的梁或隔膜形成。
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公开(公告)号:US20050066725A1
公开(公告)日:2005-03-31
申请号:US10924261
申请日:2004-08-24
申请人: Hiroshi Tanaka , Masanori Yachi , Takashi Kato , Hiroshi Ishikawa
发明人: Hiroshi Tanaka , Masanori Yachi , Takashi Kato , Hiroshi Ishikawa
CPC分类号: G01P15/09 , G01P15/0915
摘要: An acceleration sensor includes a weight and a vibrator that supports the weight at its center of gravity. When acceleration is applied to the weight, stress equivalent to the applied acceleration is generated in the vibrator. As the vibrator is arranged to support the weight at its center of gravity, a characteristic relationship is observed between the acceleration, such as angular acceleration or translational acceleration, and the size of electric charges and the polarity. By taking advantage of this relationship, different types of acceleration can be easily detected.
摘要翻译: 加速度传感器包括在其重心处支撑重量的重物和振动器。 当对重物施加加速度时,在振动器中产生与施加的加速度相当的应力。 由于振动器被布置成在其重心处支撑重物,所以在诸如角加速度或平移加速度的加速度以及电荷的大小和极性之间观察到特性关系。 通过利用这种关系,可以容易地检测不同类型的加速度。
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公开(公告)号:US06792806B2
公开(公告)日:2004-09-21
申请号:US10406252
申请日:2003-04-04
申请人: Hiroshi Ishikawa , Hiroshi Tanaka
发明人: Hiroshi Ishikawa , Hiroshi Tanaka
IPC分类号: G01P1509
CPC分类号: G01P15/097 , G01P15/0915
摘要: Providing a small-sized acceleration sensor including a vibrator formed of a piezoelectric single crystal, and a weight section connected to the vibrator and supported at a position different from the position of the center of gravity of an assembly of the vibrator and weight section. Two divided electrodes used for detecting an electrical signal are formed on the vibrator and connected to two wiring patterns of the weight section which also functions as a signal detecting substrate, with an anisotropic conductive adhesive. When an acceleration in one direction is applied, an angular moment exerted in the weight section is detected as sliding vibration by the vibrator, and an electrical signal corresponding to the acceleration is output from the electrodes through the wiring patterns.
摘要翻译: 提供一种包括由压电单晶形成的振动器的小型加速度传感器和连接到振动器的重量部分,并且支撑在与振动器和重量部分的组件的重心位置不同的位置处。 用于检测电信号的两个分开的电极形成在振动器上,并与各向异性导电粘合剂连接,该配重图案也用作信号检测基板。 当施加一个方向的加速度时,施加在重物部分中的角力矩被振动器检测为滑动振动,并且通过布线图案从电极输出对应于加速度的电信号。
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公开(公告)号:US20070062281A1
公开(公告)日:2007-03-22
申请号:US11516042
申请日:2006-09-06
申请人: Kazuhiro Ohta , Toshinobu Hosokawa , Hiroshi Tanaka , Masanori Yachi , Tsutomu Miyashita , Hiroshi Ishikawa
发明人: Kazuhiro Ohta , Toshinobu Hosokawa , Hiroshi Tanaka , Masanori Yachi , Tsutomu Miyashita , Hiroshi Ishikawa
IPC分类号: G01P9/04
CPC分类号: G01C19/5607
摘要: An angular velocity sensor includes a vibrator sensing an angular velocity, and a package on which the vibrator is mounted. The vibrator is arranged in the package so that a width direction of the vibrator coinciding with a long-side direction of the package. The vibrator may be attached to the package so that the vibrator is inclined with respect to a vertical direction.
摘要翻译: 角速度传感器包括感测角速度的振动器和安装有振动器的包装。 振动器布置在包装中,使得振动器的宽度方向与包装的长边方向一致。 振动器可以附接到包装上,使得振动器相对于垂直方向倾斜。
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公开(公告)号:US20060219008A1
公开(公告)日:2006-10-05
申请号:US11392930
申请日:2006-03-30
申请人: Hiroshi Tanaka , Toshinobu Hosokawa , Kazuhiro Ohta , Masanori Yachi , Tsutomu Miyashita , Hiroshi Ishikawa
发明人: Hiroshi Tanaka , Toshinobu Hosokawa , Kazuhiro Ohta , Masanori Yachi , Tsutomu Miyashita , Hiroshi Ishikawa
IPC分类号: G01P15/08
CPC分类号: G01C19/5607
摘要: An angular velocity sensor includes a tuning fork resonator having multiple arms that extend from a base, a single lead frame that supports the base, and a package that supports the single lead frame. The package and lead frame defines a space therebetween.
摘要翻译: 角速度传感器包括具有从基座延伸的多个臂的音叉谐振器,支撑基座的单引线框架和支撑单引线框架的封装。 封装和引线框架在其间限定了一个空间。
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公开(公告)号:US07360426B2
公开(公告)日:2008-04-22
申请号:US11154801
申请日:2005-06-17
申请人: Atsushi Machida , Sumio Yamada , Hiroshi Tanaka , Hisanori Aizawa , Kenji Nagata , Tsutomu Miyashita , Hiroshi Ishikawa
发明人: Atsushi Machida , Sumio Yamada , Hiroshi Tanaka , Hisanori Aizawa , Kenji Nagata , Tsutomu Miyashita , Hiroshi Ishikawa
IPC分类号: G01P15/12
CPC分类号: G01P15/123 , G01P1/006 , G01P15/18
摘要: An acceleration sensor that suppresses fluctuations in the offset voltage and with an enhanced temperature characteristic is provided. The acceleration sensor comprises an weight that is formed in the center of a semiconductor substrate; a frame that is formed at the circumference of the weight; a beam or diaphragm that connects the weight and frame; a detection element that is formed on the beam or diaphragm and which detects bending of the beam or diaphragm that corresponds with the applied acceleration; and a lead that is formed on the beam or diaphragm and which guides the detection output of the detection element to a pad that is provided on the frame, wherein a dummy lead comprising a plurality of dot patterns which are at least electrically independent of the lead formed on the beam or diaphragm is formed on the beam or diaphragm.
摘要翻译: 提供了抑制偏移电压波动和温度特性提高的加速度传感器。 加速度传感器包括形成在半导体衬底的中心的重物; 在该重物的圆周处形成的框架; 连接重量和框架的梁或隔膜; 检测元件,其形成在梁或隔膜上并且检测与所施加的加速度相对应的梁或隔膜的弯曲; 以及形成在所述光束或光阑上并且将所述检测元件的检测输出引导到设置在所述框架上的垫的引线,其中,包括至少电独立于所述引线的多个点图案的虚拟引线 在梁或隔膜上形成的梁或隔膜形成。
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公开(公告)号:US20080066547A1
公开(公告)日:2008-03-20
申请号:US11979486
申请日:2007-11-05
申请人: Hiroshi Tanaka , Toshinobu Hosokawa , Kazuhiro Ohta , Masanori Yachi , Tsutomu Miyashita , Hiroshi Ishikawa
发明人: Hiroshi Tanaka , Toshinobu Hosokawa , Kazuhiro Ohta , Masanori Yachi , Tsutomu Miyashita , Hiroshi Ishikawa
IPC分类号: G01C19/56
CPC分类号: G01C19/5607
摘要: An angular velocity sensor includes a tuning fork resonator having multiple arms that extend from a base, a single lead frame that supports the base, and a package that supports the single lead frame. The package and lead frame defines a space therebetween.
摘要翻译: 角速度传感器包括具有从基座延伸的多个臂的音叉谐振器,支撑基座的单引线框架和支撑单引线框架的封装。 封装和引线框架在其间限定了一个空间。
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