Acceleration sensor
    1.
    发明授权
    Acceleration sensor 失效
    加速度传感器

    公开(公告)号:US06796181B2

    公开(公告)日:2004-09-28

    申请号:US10322632

    申请日:2002-12-19

    IPC分类号: G01P1509

    CPC分类号: G01P15/0922

    摘要: An acceleration sensor includes a piezoelectric single-plate having a weight part and a detection part. The piezoelectric single-plate is, for example, an X-cut plate of LiNbO3.

    摘要翻译: 加速度传感器包括具有重量部分和检测部分的压电单板。 压电单板例如是LiNbO 3的X切割板。

    Acceleration sensor
    3.
    发明授权
    Acceleration sensor 失效
    加速度传感器

    公开(公告)号:US07299695B2

    公开(公告)日:2007-11-27

    申请号:US10924261

    申请日:2004-08-24

    IPC分类号: G01P15/09

    CPC分类号: G01P15/09 G01P15/0915

    摘要: An acceleration sensor includes a weight and a vibrator that supports the weight at its center of gravity. When acceleration is applied to the weight, stress equivalent to the applied acceleration is generated in the vibrator. As the vibrator is arranged to support the weight at its center of gravity, a characteristic relationship is observed between the acceleration, such as angular acceleration or translational acceleration, and the size of electric charges and the polarity. By taking advantage of this relationship, different types of acceleration can be easily detected.

    摘要翻译: 加速度传感器包括在其重心处支撑重量的重物和振动器。 当对重物施加加速度时,在振动器中产生与施加的加速度相当的应力。 由于振动器被布置成在其重心处支撑重物,所以在诸如角加速度或平移加速度的加速度以及电荷的大小和极性之间观察到特性关系。 通过利用这种关系,可以容易地检测不同类型的加速度。

    Acceleration sensor
    4.
    发明申请
    Acceleration sensor 失效
    加速度传感器

    公开(公告)号:US20060096379A1

    公开(公告)日:2006-05-11

    申请号:US11154801

    申请日:2005-06-17

    IPC分类号: G01P15/09

    摘要: An acceleration sensor that suppresses fluctuations in the offset voltage and with an enhanced temperature characteristic is provided. The acceleration sensor comprises an weight that is formed in the center of a semiconductor substrate; a frame that is formed at the circumference of the weight; a beam or diaphragm that connects the weight and frame; a detection element that is formed on the beam or diaphragm and which detects bending of the beam or diaphragm that corresponds with the applied acceleration; and a lead that is formed on the beam or diaphragm and which guides the detection output of the detection element to a pad that is provided on the frame, wherein a dummy lead comprising a plurality of dot patterns which are at least electrically independent of the lead formed on the beam or diaphragm is formed on the beam or diaphragm.

    摘要翻译: 提供了抑制偏移电压波动和温度特性提高的加速度传感器。 加速度传感器包括形成在半导体衬底的中心的重物; 在该重物的圆周处形成的框架; 连接重量和框架的梁或隔膜; 检测元件,其形成在梁或隔膜上并且检测与所施加的加速度相对应的梁或隔膜的弯曲; 以及形成在所述光束或光阑上并且将所述检测元件的检测输出引导到设置在所述框架上的垫的引线,其中,包括至少电独立于所述引线的多个点图案的虚拟引线 在梁或隔膜上形成的梁或隔膜形成。

    Acceleration sensor
    5.
    发明申请
    Acceleration sensor 失效
    加速度传感器

    公开(公告)号:US20050066725A1

    公开(公告)日:2005-03-31

    申请号:US10924261

    申请日:2004-08-24

    IPC分类号: G01P15/09 G01P15/08

    CPC分类号: G01P15/09 G01P15/0915

    摘要: An acceleration sensor includes a weight and a vibrator that supports the weight at its center of gravity. When acceleration is applied to the weight, stress equivalent to the applied acceleration is generated in the vibrator. As the vibrator is arranged to support the weight at its center of gravity, a characteristic relationship is observed between the acceleration, such as angular acceleration or translational acceleration, and the size of electric charges and the polarity. By taking advantage of this relationship, different types of acceleration can be easily detected.

    摘要翻译: 加速度传感器包括在其重心处支撑重量的重物和振动器。 当对重物施加加速度时,在振动器中产生与施加的加速度相当的应力。 由于振动器被布置成在其重心处支撑重物,所以在诸如角加速度或平移加速度的加速度以及电荷的大小和极性之间观察到特性关系。 通过利用这种关系,可以容易地检测不同类型的加速度。

    Acceleration sensor device
    6.
    发明授权
    Acceleration sensor device 失效
    加速度传感器装置

    公开(公告)号:US06792806B2

    公开(公告)日:2004-09-21

    申请号:US10406252

    申请日:2003-04-04

    IPC分类号: G01P1509

    CPC分类号: G01P15/097 G01P15/0915

    摘要: Providing a small-sized acceleration sensor including a vibrator formed of a piezoelectric single crystal, and a weight section connected to the vibrator and supported at a position different from the position of the center of gravity of an assembly of the vibrator and weight section. Two divided electrodes used for detecting an electrical signal are formed on the vibrator and connected to two wiring patterns of the weight section which also functions as a signal detecting substrate, with an anisotropic conductive adhesive. When an acceleration in one direction is applied, an angular moment exerted in the weight section is detected as sliding vibration by the vibrator, and an electrical signal corresponding to the acceleration is output from the electrodes through the wiring patterns.

    摘要翻译: 提供一种包括由压电单晶形成的振动器的小型加速度传感器和连接到振动器的重量部分,并且支撑在与振动器和重量部分的组件的重心位置不同的位置处。 用于检测电信号的两个分开的电极形成在振动器上,并与各向异性导电粘合剂连接,该配重图案也用作信号检测基板。 当施加一个方向的加速度时,施加在重物部分中的角力矩被振动器检测为滑动振动,并且通过布线图案从电极输出对应于加速度的电信号。

    Acceleration sensor
    9.
    发明授权
    Acceleration sensor 失效
    加速度传感器

    公开(公告)号:US07360426B2

    公开(公告)日:2008-04-22

    申请号:US11154801

    申请日:2005-06-17

    IPC分类号: G01P15/12

    摘要: An acceleration sensor that suppresses fluctuations in the offset voltage and with an enhanced temperature characteristic is provided. The acceleration sensor comprises an weight that is formed in the center of a semiconductor substrate; a frame that is formed at the circumference of the weight; a beam or diaphragm that connects the weight and frame; a detection element that is formed on the beam or diaphragm and which detects bending of the beam or diaphragm that corresponds with the applied acceleration; and a lead that is formed on the beam or diaphragm and which guides the detection output of the detection element to a pad that is provided on the frame, wherein a dummy lead comprising a plurality of dot patterns which are at least electrically independent of the lead formed on the beam or diaphragm is formed on the beam or diaphragm.

    摘要翻译: 提供了抑制偏移电压波动和温度特性提高的加速度传感器。 加速度传感器包括形成在半导体衬底的中心的重物; 在该重物的圆周处形成的框架; 连接重量和框架的梁或隔膜; 检测元件,其形成在梁或隔膜上并且检测与所施加的加速度相对应的梁或隔膜的弯曲; 以及形成在所述光束或光阑上并且将所述检测元件的检测输出引导到设置在所述框架上的垫的引线,其中,包括至少电独立于所述引线的多个点图案的虚拟引线 在梁或隔膜上形成的梁或隔膜形成。