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282 条记录 (耗时 0.037 秒)

    Acceleration sensor
    1.
    发明授权
    Acceleration sensor 失效
    加速度传感器

    公开(公告)号：US07360426B2

    公开(公告)日：2008-04-22

    申请号：US11154801

    申请日：2005-06-17

    申请人： Atsushi Machida ,  Sumio Yamada ,  Hiroshi Tanaka ,  Hisanori Aizawa ,  Kenji Nagata ,  Tsutomu Miyashita ,  Hiroshi Ishikawa

    发明人： Atsushi Machida ,  Sumio Yamada ,  Hiroshi Tanaka ,  Hisanori Aizawa ,  Kenji Nagata ,  Tsutomu Miyashita ,  Hiroshi Ishikawa

    IPC分类号： G01P15/12

    CPC分类号： G01P15/123 ,  G01P1/006 ,  G01P15/18

    摘要： An acceleration sensor that suppresses fluctuations in the offset voltage and with an enhanced temperature characteristic is provided. The acceleration sensor comprises an weight that is formed in the center of a semiconductor substrate; a frame that is formed at the circumference of the weight; a beam or diaphragm that connects the weight and frame; a detection element that is formed on the beam or diaphragm and which detects bending of the beam or diaphragm that corresponds with the applied acceleration; and a lead that is formed on the beam or diaphragm and which guides the detection output of the detection element to a pad that is provided on the frame, wherein a dummy lead comprising a plurality of dot patterns which are at least electrically independent of the lead formed on the beam or diaphragm is formed on the beam or diaphragm.

    摘要翻译： 提供了抑制偏移电压波动和温度特性提高的加速度传感器。 加速度传感器包括形成在半导体衬底的中心的重物; 在该重物的圆周处形成的框架; 连接重量和框架的梁或隔膜; 检测元件，其形成在梁或隔膜上并且检测与所施加的加速度相对应的梁或隔膜的弯曲; 以及形成在所述光束或光阑上并且将所述检测元件的检测输出引导到设置在所述框架上的垫的引线，其中，包括至少电独立于所述引线的多个点图案的虚拟引线 在梁或隔膜上形成的梁或隔膜形成。

    Acceleration sensor
    2.
    发明申请
    Acceleration sensor 失效
    加速度传感器

    公开(公告)号：US20060096379A1

    公开(公告)日：2006-05-11

    申请号：US11154801

    申请日：2005-06-17

    申请人： Atsushi Machida ,  Sumio Yamada ,  Hiroshi Tanaka ,  Hisanori Aizawa ,  Kenji Nagata ,  Tsutomu Miyashita ,  Hiroshi Ishikawa

    发明人： Atsushi Machida ,  Sumio Yamada ,  Hiroshi Tanaka ,  Hisanori Aizawa ,  Kenji Nagata ,  Tsutomu Miyashita ,  Hiroshi Ishikawa

    IPC分类号： G01P15/09

    CPC分类号： G01P15/123 ,  G01P1/006 ,  G01P15/18

    摘要： An acceleration sensor that suppresses fluctuations in the offset voltage and with an enhanced temperature characteristic is provided. The acceleration sensor comprises an weight that is formed in the center of a semiconductor substrate; a frame that is formed at the circumference of the weight; a beam or diaphragm that connects the weight and frame; a detection element that is formed on the beam or diaphragm and which detects bending of the beam or diaphragm that corresponds with the applied acceleration; and a lead that is formed on the beam or diaphragm and which guides the detection output of the detection element to a pad that is provided on the frame, wherein a dummy lead comprising a plurality of dot patterns which are at least electrically independent of the lead formed on the beam or diaphragm is formed on the beam or diaphragm.

    摘要翻译： 提供了抑制偏移电压波动和温度特性提高的加速度传感器。 加速度传感器包括形成在半导体衬底的中心的重物; 在该重物的圆周处形成的框架; 连接重量和框架的梁或隔膜; 检测元件，其形成在梁或隔膜上并且检测与所施加的加速度相对应的梁或隔膜的弯曲; 以及形成在所述光束或光阑上并且将所述检测元件的检测输出引导到设置在所述框架上的垫的引线，其中，包括至少电独立于所述引线的多个点图案的虚拟引线 在梁或隔膜上形成的梁或隔膜形成。

    Acceleration sensor
    3.
    发明申请
    Acceleration sensor 审中-公开
    加速度传感器

    公开(公告)号：US20060086185A1

    公开(公告)日：2006-04-27

    申请号：US11105586

    申请日：2005-04-14

    申请人： Hiroshi Tanaka ,  Hiroshi Ishikawa ,  Kenji Nagata ,  Masaaki Ono ,  Tsutomu Miyashita ,  Sumio Yamada ,  Nobuko Ono

    发明人： Hiroshi Tanaka ,  Hiroshi Ishikawa ,  Kenji Nagata ,  Masaaki Ono ,  Tsutomu Miyashita ,  Sumio Yamada ,  Nobuko Ono

    IPC分类号： G01P15/125 ,  G01P15/00

    CPC分类号： B81B7/0048 ,  B81B3/0072 ,  B81B2201/0235 ,  G01D11/30 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/0842

    摘要： An acceleration sensor with reduced noise that resolves the problem of stress arising from a difference in thermal expansion coefficients is provided. The acceleration sensor detects acceleration in three-axis directions in a three-dimensional coordinate system, and includes a frame having four sides that is integrally formed by a semiconductor substrate; a weight portion that is positioned within the frame; and four beam portions, corresponding with each of the four sides, one end of which is connected to the weight portion to support the weight portion and the other end of which is connected to the center of the corresponding side of the four sides, wherein a detection element that detects flexure of the beam portions that corresponds to the acceleration acting on the weight portion is formed on each of the four beam portions; a pair of joint portions that are formed with a gap there between are formed on each of the four sides of the frame; and the gap between the pair of joint portions formed on one side has a predetermined length with the center of the one side as the point of symmetry.

    摘要翻译： 提供了一种降低噪声的加速度传感器，其解决了由热膨胀系数差引起的应力问题。 加速度传感器在三维坐标系中检测三轴方向的加速度，并且包括具有由半导体基板一体形成的四个侧面的框架; 位于框架内的重物部分; 以及四个梁部分，其对应于四个侧面中的每一个，其一端连接到配重部分，以支撑重物部分，另一端连接到四个侧面的相应侧部的中心，其中， 在所述四个梁部分中的每一个上形成检测对应于作用在所述配重部分上的加速度的梁部分的挠曲的检测元件; 在框架的四个侧面上形成有形成有间隙的一对接合部， 在一侧形成的一对接合部之间的间隙以一侧的中心为对称点，具有规定的长度。

    Angular velocity sensor
    4.
    发明授权
    Angular velocity sensor 失效
    角速度传感器

    公开(公告)号：US07188525B2

    公开(公告)日：2007-03-13

    申请号：US10126750

    申请日：2002-04-22

    申请人： Atsushi Machida ,  Suguru Warashina ,  Hiroshi Ishikawa ,  Tsutomu Miyashita ,  Yoshio Satoh

    发明人： Atsushi Machida ,  Suguru Warashina ,  Hiroshi Ishikawa ,  Tsutomu Miyashita ,  Yoshio Satoh

    IPC分类号： G01P9/04

    CPC分类号： G01C19/5607

    摘要： An angular velocity sensor is provided that includes a frame, an oscillator and torsion bars that connect the oscillator to the frame. The frame, the oscillator and the torsion bar are formed integral with each other by etching a material substrate in the thickness direction of the substrate. The oscillator, configured in the form of an H, includes a support, two first arms and two second arms. These arms extend from the support in an arm-extending direction perpendicular to the thickness direction of the substrate. The oscillator includes a mounting surface that is provided with a piezoelectric driver for generating in-plane oscillation of the oscillator, and with a piezoelectric detector for detecting out-of-plane oscillation of the oscillator.

    摘要翻译： 提供了一种角速度传感器，其包括将振荡器连接到框架的框架，振荡器和扭杆。 通过在基板的厚度方向上蚀刻材料基板，将框架，振荡器和扭杆形成为一体。 以H形式构成的振荡器包括支撑件，两个第一臂和两个第二臂。 这些臂从支撑件沿与基板的厚度方向垂直的臂延伸方向延伸。 振荡器包括安装表面，该安装表面设置有用于产生振荡器的平面内振荡的压电驱动器，以及用于检测振荡器的平面外振荡的压电检测器。

    Acceleration sensor
    10.
    发明申请
    Acceleration sensor 失效
    加速度传感器

    公开(公告)号：US20060130584A1

    公开(公告)日：2006-06-22

    申请号：US11227202

    申请日：2005-09-16

    申请人： Masaaki Ono ,  Nobuko Ono ,  Hiroshi Ishikawa ,  Hiroshi Tanaka ,  Sumio Yamada

    发明人： Masaaki Ono ,  Nobuko Ono ,  Hiroshi Ishikawa ,  Hiroshi Tanaka ,  Sumio Yamada

    IPC分类号： G01P15/00

    CPC分类号： G01P15/18 ,  G01P1/023 ,  G01P15/123 ,  G01P2015/084 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48465 ,  H01L2924/00014 ,  H01L2924/00

    摘要： A structure with superior shock resistance is proposed for a parasol-type acceleration sensor. The acceleration sensor comprises a support portion the lower end of which is fixed to a substrate; a beam portion on which a detection element for applying changes to an output signal in correspondence with strain caused by acceleration acting on the detection element is formed, one end of the beam portion being connected to the top part of the support portion; a suspended weight connected to the other end of the beam portion; and a stopper substrate with a window portion through which, in order to guide an output signal of the detection element via a pad that is formed on the upper end face of the support portion, a conductor lead that is connected to the pad passes. Overswing of the weight is limited by means of the stopper substrate.

    摘要翻译： 提出了一种具有优异抗冲击性的结构，用于遮阳式加速度传感器。 加速度传感器包括其下端固定到基板的支撑部分; 一个梁部分，其上形成有用于施加的检测元件对应于由作用在检测元件上的加速度引起的应变而变化的输出信号，梁部分的一端连接到支撑部分的顶部; 连接到所述梁部分的另一端的悬挂重物; 以及具有窗口部分的止动基板，为了通过形成在支撑部分的上端面上的焊盘引导检测元件的输出信号，与焊盘连接的导体引线通过。 通过止动器基板限制重量的超越。