FLUID PRESSURE IMPRINTING DEVICE PROVIDED WITH PRESSURIZATION UNIT SECURING TOOL
    1.
    发明申请
    FLUID PRESSURE IMPRINTING DEVICE PROVIDED WITH PRESSURIZATION UNIT SECURING TOOL 审中-公开
    流体压力加压装置提供加压装置工具

    公开(公告)号:US20140147543A1

    公开(公告)日:2014-05-29

    申请号:US14232081

    申请日:2012-07-06

    IPC分类号: B29C59/02

    CPC分类号: B29C59/02 G11B5/855

    摘要: An imprinting device is provided which is capable of using small an opening/closing device even when a transfer area increases. The imprinting device that transfers a molding pattern of a die to a molding target includes a pressurization unit that includes a pressurization chamber to pressurize the die and the molding target by a fluid, a stage that supports the die and the molding target pressurized by the pressurization unit, a pressurization device for adjusting the pressure of the fluid inside the pressurization chamber, an opening/closing device for relatively moving the pressurization unit and the stage, and a securing tool that secures the pressurization unit and the stage so as to prevent or suppress an application of force generated by the pressurization unit to the opening/closing device.

    摘要翻译: 提供一种即使当传送区域增加时也能够使用小的打开/关闭装置的压印装置。 将模具的成形图案转印到模制对象的压印装置包括加压单元,该加压单元包括通过流体对模具和成型目标物进行加压的加压室,支撑模具的阶段和通过加压加压的模制对象 单元,用于调节加压室内的流体的压力的加压装置,用于使加压单元和载物台相对移动的开闭装置,以及固定加压单元和载物台以防止或抑制的固定工具 施加由加压单元产生的力到打开/关闭装置。