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公开(公告)号：USD663760S1
公开(公告)日：2012-07-17
申请号：US29404638
申请日：2011-10-24
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公开(公告)号：US08926807B2
公开(公告)日：2015-01-06
申请号：US13016053
申请日：2011-01-28
申请人： Yuji Kajihara
发明人： Yuji Kajihara
CPC分类号： C23C14/54 , C23C14/50 , C23C14/505 , H01J2237/2007 , H01J2237/3132
摘要： To uniformly perform processing such as deposition on a processing object such as a large, heavy substrate for optics, the large, heavy substrate for optics is accurately, reliably attached to a holder. A vacuum processing apparatus which processes a processing object in a vacuum vessel includes a susceptor which has a surface having concavity and convexity, that is opposite to its surface on which the processing object is mounted, and movably holds the processing object, a holder which has a surface having concavity and convexity which mesh with those of the susceptor, a driving mechanism which holds the holder to be movable to a first state or a second state, and a control means for moving the susceptor while the holder is held in the first state to mesh the surface, having the concavity and convexity, of the susceptor with the surface, having the concavity and convexity, of the holder and thereby connect the susceptor and the holder to each other, moving the holder, to which the susceptor is connected, to the second state and processing the processing object, and moving the holder to the first state again and moving the susceptor so that the surface, having the concavity and convexity, of the susceptor is separated from the surface, having the concavity and convexity, of the holder.
摘要翻译： 为了均匀地进行诸如沉积在诸如用于光学器件的大的重的基底的处理对象上的处理，用于光学的大的重的基底被准确地可靠地附接到保持器。 处理真空容器中的处理对象的真空处理装置包括具有凹凸面的基座，其与安装有加工对象的表面相反，并且可移动地保持加工对象，具有 具有与所述基座的孔相啮合的凹凸面的表面，保持所述保持件能够移动到第一状态或第二状态的驱动机构，以及用于在所述保持器保持在所述第一状态下使所述基座移动的控制单元 使具有凹部和凹凸的基座的表面具有凹凸的表面，从而将基座和支架彼此连接，使基座与基座相连接的支架移动， 到第二状态并处理处理对象，并且再次将保持器移动到第一状态并移动基座，使得具有凹凸的表面 将基座从保持器的凹凸表面分离出来。
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公开(公告)号：US20110120858A1
公开(公告)日：2011-05-26
申请号：US13016053
申请日：2011-01-28
申请人： Yuji Kajihara
发明人： Yuji Kajihara
CPC分类号： C23C14/54 , C23C14/50 , C23C14/505 , H01J2237/2007 , H01J2237/3132
摘要： To uniformly perform processing such as deposition on a processing object such as a large, heavy substrate for optics, the large, heavy substrate for optics is accurately, reliably attached to a holder. A vacuum processing apparatus which processes a processing object in a vacuum vessel includes a susceptor which has a surface having concavity and convexity, that is opposite to its surface on which the processing object is mounted, and movably holds the processing object, a holder which has a surface having concavity and convexity which mesh with those of the susceptor, a driving mechanism which holds the holder to be movable to a first state or a second state, and a control means for moving the susceptor while the holder is held in the first state to mesh the surface, having the concavity and convexity, of the susceptor with the surface, having the concavity and convexity, of the holder and thereby connect the susceptor and the holder to each other, moving the holder, to which the susceptor is connected, to the second state and processing the processing object, and moving the holder to the first state again and moving the susceptor so that the surface, having the concavity and convexity, of the susceptor is separated from the surface, having the concavity and convexity, of the holder.
摘要翻译： 为了均匀地进行诸如沉积在诸如用于光学器件的大的重的基底的处理对象上的处理，用于光学的大的重的基底被准确地可靠地附接到保持器。 处理真空容器中的处理对象的真空处理装置包括具有凹凸面的基座，其与安装有加工对象的表面相反，并且可移动地保持加工对象，具有 具有与所述基座的孔相啮合的凹凸面的表面，保持所述保持件能够移动到第一状态或第二状态的驱动机构，以及用于在所述保持器保持在所述第一状态下使所述基座移动的控制单元 使具有凹部和凹凸的基座的表面具有凹凸的表面，从而将基座和支架彼此连接，使基座与基座相连接的支架移动， 到第二状态并处理处理对象，并且再次将保持器移动到第一状态并移动基座，使得具有凹凸的表面 将基座从保持器的凹凸表面分离出来。
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