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公开(公告)号：US5756878A
公开(公告)日：1998-05-26
申请号：US585770
申请日：1996-01-16
CPC分类号： G01N27/185
摘要： A thermal conductivity measuring device includes a diaphragm portion, a thermal conductivity detector, a temperature sensor, a control section, and a thermal conductivity calculating section. The diaphragm portion is formed on a base. The thermal conductivity detector is formed in the diaphragm portion to perform conduction of heat to/from a sample gas. The temperature sensor is disposed on the base to be near the thermal conductivity detector so as to measure the ambient temperature around the base. The temperature sensor is thermally insulated from the thermal conductivity detector. The control section controls the amount of energy supplied to the thermal conductivity detector such that the temperature difference between the ambient temperature measured by the temperature sensor and the heating temperature of the thermal conductivity detector becomes a constant value. The thermal conductivity calculating section calculates the thermal conductivity of the sample gas on the basis of the amount of energy supplied to the thermal conductivity detector while the temperature difference is kept at the constant value by the control section.
摘要翻译： 热导率测量装置包括隔膜部分，热导率检测器，温度传感器，控制部分和热导率计算部分。 隔膜部分形成在基座上。 热导率检测器形成在隔膜部分中以对样品气体进行热传导。 温度传感器设置在基座上以靠近热导率检测器，以便测量围绕基座的环境温度。 温度传感器与热导检测器隔热。 控制部分控制提供给热导检测器的能量的量，使得由温度传感器测量的环境温度与热导率检测器的加热温度之间的温度差变为恒定值。 热导率计算部根据通过控制部将温度差保持为恒定值的供给到热导率检测器的能量的量来计算样品气体的热导率。
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公开(公告)号：US5291781A
公开(公告)日：1994-03-08
申请号：US59890
申请日：1993-05-10
CPC分类号： G01F1/6845
摘要： A diaphragm-type sensor is disclosed which comprises a substrate including a cavity, a diaphragm formed on the cavity and supported by the substrate, a heater element arranged on the diaphragm, two sensor elements arranged on both sides of the heater means and slits between the heater means and the respective sensor means. The slits are effective in completely preventing the deformation of the diaphragm due to a heat propagated from the heater element, from influencing the sensor elements, whereby the diaphragm-type sensor exhibits stable output characteristics.
摘要翻译： 公开了一种隔膜式传感器，其包括：基板，包括腔体，形成在腔体上并由基板支撑的隔膜;布置在隔膜上的加热器元件;布置在加热器装置两侧的两个传感器元件; 加热器装置和相应的传感器装置。 狭缝有效地完全防止由加热器元件传播的热量引起的隔膜的变形，从而影响传感器元件，由此膜片式传感器表现出稳定的输出特性。
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公开(公告)号：US5295389A
公开(公告)日：1994-03-22
申请号：US923138
申请日：1992-07-31
摘要： A thermal conductivity detector includes a thin diaphragm, a heat-generating portion, and a pair of boundary holes. The thin diaphragm is obtained by forming a space in part of a base. The heat-generating portion is formed in the diaphragm. The boundary holes are formed to surround the heat-generating portion.
摘要翻译： 热导率检测器包括薄膜，发热部和一对边界孔。 薄膜通过在基部的一部分中形成空间而获得。 发热部形成在隔膜中。 边界孔形成为围绕发热部。
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公开(公告)号：US5321983A
公开(公告)日：1994-06-21
申请号：US985576
申请日：1992-12-03
申请人： Mitsuhiko Nagata
发明人： Mitsuhiko Nagata
CPC分类号： G01F1/6845 , G01P5/10
摘要： In a method of correcting temperature characteristics of a flow velocity sensor, the flow velocity sensor having a heater and a pair of temperature-measuring sensors arranged on both sides thereof is set such that the temperature-measuring sensors are located at upper and lower vertical positions along the flow of a target gas to be measured. A difference in self-heat amount is set between one of the temperature-measuring sensors, located on an upstream side of the flow of the gas, and the other temperature-measuring sensor located on a downstream side of the flow of the gas.
摘要翻译： 在校正流速传感器的温度特性的方法中，设置有设置在其两侧的加热器和一对温度测量传感器的流速传感器，使得温度测量传感器位于上下垂直位置 沿着待测量的目标气体的流动。 在位于气体流动的上游侧的温度测量传感器之一和位于气体流动下游侧的另一个温度测量传感器之间设定自热量的差异。
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