公开(公告)号：US4657775A

公开(公告)日：1987-04-14

申请号：US815305

申请日：1985-12-30

申请人： Hisanori Shioiri ,  Mitsuhiro Kiuchi ,  Mineo Takayama ,  Toshio Homma ,  Hiroshi Nagasaka ,  Yoshikazu Kaneko

发明人： Hisanori Shioiri ,  Mitsuhiro Kiuchi ,  Mineo Takayama ,  Toshio Homma ,  Hiroshi Nagasaka ,  Yoshikazu Kaneko

IPC分类号： H01C10/10 ,  H01C17/075 ,  H01L21/205 ,  H01L29/84 ,  B05D3/06

CPC分类号： H01C10/10 ,  H01C17/075

摘要： Semiconductor piezoresistive devices can be obtained by the plasma CVD method, i.e., exposing a substrate to a plasma atmosphere produced from silicon hydride gas containing boron hydride to deposit on the substrate a thin film of crystalline silicon as a piezoresistive material. In accordance with this method, it is possible to form piezoresistive devices into IC's and also to impart excellent properties thereto.

摘要翻译： 半导体压阻器件可以通过等离子体CVD方法获得，即将衬底暴露于由含有氢化硼的氢化硅气体产生的等离子体气氛中，以沉积在衬底上的晶体硅薄膜作为压阻材料。 根据该方法，可以将IC形成压阻器件并赋予其优异的性能。

公开(公告)号：US06983665B2

公开(公告)日：2006-01-10

申请号：US09983976

申请日：2001-10-26

申请人： Haruyuki Miyazaki ,  Toshio Homma

发明人： Haruyuki Miyazaki ,  Toshio Homma

IPC分类号： G01L1/22

CPC分类号： G01G19/12 ,  G01L1/2287

摘要： A fixing structure for a sensing element, wherein a load sensor is located at the central part of a plate member as a support member of a sensing element in the longitudinal direction. The plate member is attached to a load measuring location so that a length of the plate member when viewed in the longitudinal direction expands and contracts in accordance with a tension force or a compression force applied to the load measuring location, and both ends of the plate member when viewed in the longitudinal direction are welded to the load measuring location.