公开(公告)号：US20210396561A1

公开(公告)日：2021-12-23

申请号：US17291535

申请日：2019-11-14

Applicant: Hitachi Astemo, Ltd.

Inventor： Takayuki YOGO ,  Binti Haridan FATIN FARHANAH ,  Hiroyuki ABE ,  Satoshi IKEO ,  Yuta CHIBA

IPC: G01F1/69

Abstract: Provided is a physical quantity measurement device capable of preventing a sealing of a cavity portion on a back surface side of a diaphragm of a thermal air flow rate sensor while improving measurement accuracy of the thermal air flow rate sensor as compared with the related art. A physical quantity measurement device 20 includes a lead frame 208f having a mounting surface f1 on which a flow rate sensor 205 which is the thermal air flow rate sensor is mounted, and a flow passage forming member 209 disposed on a back surface f2 opposite to the mounting surface f1 of the lead frame 208f. A ventilation flow path 210 is formed by a first through hole 211 provided in the lead frame 208f and communicating with a cavity portion 205c of the flow rate sensor 205, a second through hole 212 provided in the lead frame 208f and opened in the mounting surface f1, and a connection flow path 213 that is defined between the lead frame 208f and the flow passage forming member 209 and connecting the first through hole 211 and the second through hole 212.