公开(公告)号：US20240266141A1

公开(公告)日：2024-08-08

申请号：US18561202

申请日：2021-05-17

Applicant: Hitachi High-Tech Corporation

Inventor： Hiroyuki ASAKURA ,  Hideki KIKUCHI ,  Toshie YAGUCHI

IPC: H01J37/20 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/20214

Abstract: A sample holder with high versatility is provided. A sample holder 100 includes a holder shaft 2, a placement unit 3 on which a sample SAM is placeable, a moving mechanism 4 that moves the holder shaft in a first direction, rotating mechanism 5 that rotates the holder shaft 2 in a first rotation direction with a center of the holder shaft 2 as a rotation axis, a protrusion unit 6 that is fixed to the holder shaft 2 so as to protrude in a second direction intersecting the first direction and whose position is changed according to the rotation and movement of the holder shaft 2, and a guide unit 7 that surrounds an outer periphery of the holder shaft 2 and whose position is not changed according to the rotation and movement of the holder shaft 2. The guide unit 7 is provided with a through hole (7a) and a through hole (7b). A width of the through hole (7a) in the first rotation direction is larger than a width of the through hole (7b) in the first rotation direction. The protrusion unit 6 is movable inside the through hole (7a) and inside the through hole (7b).