公开(公告)号：US20240212973A1

公开(公告)日：2024-06-27

申请号：US18534853

申请日：2023-12-11

Applicant: Hitachi High-Tech Corporation

Inventor： Kaoru SAKAI ,  Mayuka OSAKI ,  Hajime KAWANO

IPC: H01J37/22 ,  G06T5/70 ,  G06T5/94 ,  G06T7/00 ,  G06T7/70 ,  G06V10/22 ,  G06V10/74 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/222 ,  G06T5/70 ,  G06T5/94 ,  G06T7/001 ,  G06T7/70 ,  G06V10/22 ,  G06V10/74 ,  H01J37/244 ,  H01J37/28 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J2237/2448

Abstract: A processor system capable of communicating with the multi-charged particle beam device includes reducing an influence of first crosstalk caused by a first detector detecting secondary electrons from a second scanning region by recognizing a first ghost caused by the first crosstalk from a first image using the first image. The processor system modifies a first occurrence region of the first ghost, or outputs a defect candidate position as a defect position when the detected defect candidate position is outside the first occurrence region.