公开(公告)号：US20240403183A1

公开(公告)日：2024-12-05

申请号：US18698452

申请日：2021-10-29

Applicant: Hitachi High-Tech Corporation

Inventor： Yasuhiro YOSHIDA ,  Masayoshi ISHIKAWA ,  Fumihiro SASAJIMA ,  Shigeo OKOSHI

IPC: G06F11/32 ,  G06F11/30

Abstract: This error factor estimation device 100 is a device for estimating the error factor of errors that occur, and comprises: a feature-quantity-group-generating unit A2a that processes data including inspection results collected from an inspection device and generates a plurality of feature quantities; a model-generating unit 4 that generates a model A5a for learning the relationship between the plurality of feature quantities generated by the feature-quantity-group-generating unit A2a and errors; a contribution-degree-calculating unit 11 that calculates a contribution degree indicating the degree of contribution to the output of the model A5a for at least one of the plurality of feature quantities used for the model A5a learning; and an error factor acquisition unit 15 that acquires error factors labeled with feature quantities selected on the basis of the usefulness calculated from the contribution degree calculated by the contribution-degree-calculating unit 11.