公开(公告)号：US20240403183A1

公开(公告)日：2024-12-05

申请号：US18698452

申请日：2021-10-29

Applicant: Hitachi High-Tech Corporation

Inventor： Yasuhiro YOSHIDA ,  Masayoshi ISHIKAWA ,  Fumihiro SASAJIMA ,  Shigeo OKOSHI

IPC: G06F11/32 ,  G06F11/30

Abstract: This error factor estimation device 100 is a device for estimating the error factor of errors that occur, and comprises: a feature-quantity-group-generating unit A2a that processes data including inspection results collected from an inspection device and generates a plurality of feature quantities; a model-generating unit 4 that generates a model A5a for learning the relationship between the plurality of feature quantities generated by the feature-quantity-group-generating unit A2a and errors; a contribution-degree-calculating unit 11 that calculates a contribution degree indicating the degree of contribution to the output of the model A5a for at least one of the plurality of feature quantities used for the model A5a learning; and an error factor acquisition unit 15 that acquires error factors labeled with feature quantities selected on the basis of the usefulness calculated from the contribution degree calculated by the contribution-degree-calculating unit 11.

公开(公告)号：US20240111281A1

公开(公告)日：2024-04-04

申请号：US18375734

申请日：2023-10-02

Applicant: Hitachi High-Tech Corporation

Inventor： Kenji TAMAKI ,  Wataru KANNO ,  Takashi DOI ,  Fumihiro SASAJIMA

IPC: G05B23/02 ,  G05B13/04

CPC classification number: G05B23/0283 ,  G05B13/048 ,  G05B23/024

Abstract: A deterioration prediction system for a semiconductor manufacturing equipment or a semiconductor inspection equipment, including: an input device receiving, as an input, time series data indicating a state of the equipment; a deterioration prediction device having an estimation unit discriminating fluctuation in the time series data into fluctuation caused by changing setting of the equipment and fluctuation caused by deterioration of the equipment and estimating a time point when the setting is changed, a division unit dividing the time series data into the plurality of periods bounded by the time points, a discrimination unit discriminating at least a trend component from the fluctuation in the time series data in the period, and a prediction unit predicting the deterioration of the equipment based on at least the trend component; and an output device outputting a result of the prediction.

公开(公告)号：US20230325413A1

公开(公告)日：2023-10-12

申请号：US18024930

申请日：2020-09-17

Applicant: Hitachi High-Tech Corporation

Inventor： Yasuhiro YOSHIDA ,  Masayoshi ISHIKAWA ,  Fumihiro SASAJIMA ,  Masami TAKANO ,  Koichi HAYAKAWA

IPC: G06F16/28 ,  G06F16/22

CPC classification number: G06F16/285 ,  G06F16/2246

Abstract: An error cause estimation device comprising: a data pre-processing unit that uses data to be processed and generates training data that has an appropriate format for input to a machine learning model; and a model tree generation unit that generates error detection models that are training models for detecting errors and uses the training data as inputs therefor, and generates a model tree that expresses the relationship between error detection models by using a tree structure that has the error detection models as node therefor. Thus, it is possible to generate a training model that detects errors for each of a plurality of types of errors that occur, even when there has been no prior annotation of error causes.

公开(公告)号：US20230095532A1

公开(公告)日：2023-03-30

申请号：US17907921

申请日：2020-03-30

Applicant: Hitachi High-Tech Corporation

Inventor： Fumihiro SASAJIMA ,  Masami TAKANO ,  Kazuhiro UEDA ,  Masayoshi ISHIKAWA ,  Yasuhiro YOSHIDA

IPC: G05B23/02

Abstract: The present disclosure proposes a diagnostic system capable of properly identifying the cause of even an error for which multiple factors or multiple compound factors may be accountable. The diagnostic system according to the present disclosure is provided with a learning device for learning at least one of a recipe defining operations of an inspection device, log data describing states of the device, or specimen data describing characteristics of a specimen in association with error types of the device, and estimates the cause of the error by using the learning device (refer to FIG. 4).

公开(公告)号：US20230122653A1

公开(公告)日：2023-04-20

申请号：US17908731

申请日：2020-03-31

Applicant: Hitachi High-Tech Corporation

Inventor： Yasuhiro YOSHIDA ,  Masayoshi ISHIKAWA ,  Kouichi HAYAKAWA ,  Masami TAKANO ,  Fumihiro SASAJIMA

IPC: G06F11/07 ,  G06F11/34

Abstract: An error cause estimation device comprises a feature value generation unit for using data transmitted from the outside to generate feature values suitable for a machine learning model; a model database having a plurality of error prediction models, for determining whether an error has occurred using the feature values as input data; a model evaluation unit for evaluating the performance of an error prediction model by comparing a prediction result of the error prediction model and an actually measured error; a model selection unit for selecting from the model database an error prediction model for which an evaluation value calculated by the model evaluation unit is greater than or equal to a preset defined value; and an error prediction model generation unit for generating a new error prediction model with respect to the measured error when no corresponding error prediction model has been selected by the model selection unit.