公开(公告)号：US20220367147A1

公开(公告)日：2022-11-17

申请号：US17771551

申请日：2020-10-06

Applicant: Hitachi High-Tech Corporation

Inventor： Takahiro NISHIHATA ,  Mayuka OSAKI ,  Yuji TAKAGI ,  Takuma YAMAMOTO ,  Makoto SUZUKI

IPC: H01J37/28 ,  H01J37/244 ,  H01J37/22

Abstract: A charged particle beam device 1 includes: a plurality of detectors 7 for detecting a signal particle 9 emitted from a sample 8 irradiated with a charged particle beam 3 and converting the detected signal particle 9 into an output electrical signal 17; an energy discriminator 14 provided for each detector 7 and configured to discriminate the output electrical signal 17 according to energy of the signal particle 9; a discrimination control block 21 for setting an energy discrimination condition of each of the energy discriminators 14; and an image calculation block 22 for generating an image based on the discriminated electrical signal. The discrimination control block 21 sets energy discrimination conditions different from each other among the plurality of energy discriminators 14.

公开(公告)号：US20230032587A1

公开(公告)日：2023-02-02

申请号：US17855888

申请日：2022-07-01

Applicant: Hitachi High-Tech Corporation

Inventor： Takahiro NISHIHATA ,  Yuji TAKAGI ,  Takuma YAMAMOTO ,  Yasunori GOTO ,  Yasutaka TOYODA

IPC: H01J37/22 ,  H01J37/28 ,  G01N23/2251

Abstract: A method, an apparatus, and a program for more appropriately determining a condition for appropriately recognizing a semiconductor pattern are provided. A method for determining a condition related to a captured image of a charged particle beam apparatus including: acquiring, by a processor, a plurality of captured images, each of the captured images being an image generated by irradiating a pattern formed on a wafer with a charged particle beam, and detecting electrons emitted from the pattern, each of the captured images being an image captured according to one or more imaging conditions, the method further including: acquiring teaching information for each of the captured images; acquiring, by the processor, one or more feature determination conditions; calculating, by the processor, a feature for each of the captured images based on each of the feature determination conditions, at least one of the imaging condition and the feature determination condition being plural.