公开(公告)号：US20230077332A1

公开(公告)日：2023-03-16

申请号：US17895264

申请日：2022-08-25

Applicant: Hitachi High-Tech Corporation

Inventor： Yuko SANO ,  Masayoshi ISHIKAWA ,  Hiroyuki SHINDO

IPC: G06T7/00 ,  G01N21/95 ,  G06T7/70 ,  G06V10/764 ,  G06V10/22 ,  G06V10/774 ,  G06V10/82

Abstract: A defect inspection system includes: a defect detection unit that detects defect positions in an inspection image by comparing an inspection image with a reference image that is an image having no defect; a filter model that classifies detected defect positions into false defect or a designated type of defect; a filter condition holding unit that holds a filter condition; a defect region extraction unit that collects the defect positions detected by the defect detection unit for each predetermined distance; a defect filter unit that determines whether or not each defect region satisfies the filter condition and extracts only the defect region that satisfies the filter condition; and a normalization unit that normalizes the inspection image based on a processing step at the time of inspection and a normalization condition set for each processing step or each imaging condition.

公开(公告)号：US20220246302A1

公开(公告)日：2022-08-04

申请号：US17621884

申请日：2020-06-22

Applicant: Hitachi High-Tech Corporation

Inventor： Daisuke FUKUI ,  Hiromitsu NAKAGAWA ,  Takeshi TANAKA ,  Yuko SANO ,  Masatoshi MIYAKE ,  Nobuya HORIKOSHI

IPC: G16H50/20 ,  G06N20/20

Abstract: An object of the invention is to harmonize prediction accuracy and an analysis time of an ensemble model. Therefore, when performing data analysis using an ensemble model 300 that makes an inference by integrating inferences by first to n-th models, an i-th model (1≤i≤n) constituting the ensemble model 300 is selected from an i-th model group of the model data, at least one model group of the first to n-th model groups includes a plurality of models, and the first to n-th models capable of constituting an ensemble model satisfying a performance requirement for data analysis and a constraint requirement for time required for the data analysis are selected from the first to n-th model groups 301 to 303.