公开(公告)号：US10151773B2

公开(公告)日：2018-12-11

申请号：US15468668

申请日：2017-03-24

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Masatsugu Shigeno ,  Kazutoshi Watanabe ,  Masafumi Watanabe ,  Hiroyoshi Yamamoto ,  Kazuo Chinone

IPC: G01Q60/26 ,  G01Q10/04 ,  G01Q10/02 ,  G01Q10/06

Abstract: According to this invention, a scanning probe microscope for scanning a surface of a sample with a probe by bringing the probe into contact with the surface of the sample, comprises a cantilever having the probe at its tip; a displacement detection unit to detect both a bending amount and a torsion amount of the cantilever; and a contact determination unit to determine a primary contact of the probe with the surface of the sample, based on the bending amount and the torsion amount detected by the displacement detection unit in all directions from an undeformed condition of the cantilever.

公开(公告)号：US20180284151A1

公开(公告)日：2018-10-04

申请号：US15937306

申请日：2018-03-27

Applicant: Hitachi High-Tech Science Corporation

Inventor： Masatsugu Shigeno ,  Kazutoshi Watanabe ,  Hiroyoshi Yamamoto

IPC: G01Q10/04

CPC classification number: G01Q10/045 ,  G01Q60/34

Abstract: A scanning probe microscope has a cantilever having a probe at a tip of the cantilever, a driving unit that performs a separating operation for separating one of the sample and the probe from the other at a speed exceeding a response speed of the cantilever from a state where the probe is in contact with the surface of the sample, a determination unit that determines that the probe is separated from the surface of the sample when vibration of the cantilever at a predetermined amplitude is detected at a resonant frequency of the cantilever during the separating operation, and a driving control unit that stops the separating operation when the determination unit determines that the probe is separated from the surface of the sample and relatively moves the probe and the sample to a position where the probe is located on a next measuring point of the sample.

公开(公告)号：US20170285067A1

公开(公告)日：2017-10-05

申请号：US15468668

申请日：2017-03-24

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Masatsugu Shigeno ,  Kazutoshi Watanabe ,  Masafumi Watanabe ,  Hiroyoshi Yamamoto ,  Kazuo Chinone

IPC: G01Q10/02

CPC classification number: G01Q10/02 ,  G01Q10/065

Abstract: According to this invention, a scanning probe microscope for scanning a surface of a sample with a probe by bringing the probe into contact with the surface of the sample, comprises a cantilever having the probe at its tip; a displacement detection unit to detect both a bending amount and a torsion amount of the cantilever; and a contact determination unit to determine a primary contact of the probe with the surface of the sample, based on the bending amount and the torsion amount detected by the displacement detection unit in all directions from an undeformed condition of the cantilever.

公开(公告)号：US09678104B2

公开(公告)日：2017-06-13

申请号：US14994925

申请日：2016-01-13

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Hiroyoshi Yamamoto

IPC: G01Q20/02 ,  G01Q30/02

CPC classification number: G01Q20/02 ,  G01Q30/025

Abstract: A scanning probe microscope capable of controlling a decrease of the resolution of an objective lens disposed in the scanning probe microscope, and capable of easily carrying out the adjustment of an optical axis of an optical lever using the objective lens. The scanning probe microscope includes: a cantilever having a probe; a light source part radiating beams; a first reflective part reflecting an incident beam (L0) and guiding the incident beam to a reflective surface; a light receiving part receiving the beams; a second reflective part reflecting a reflected beam (L1) and guiding the reflected beam to the light receiving part; and an objective lens disposed to face the cantilever and adopted to observe and capture an area around the cantilever, the objective lens having the number of openings of NA, wherein the first reflective part is disposed at a position between the objective lens and the cantilever.

公开(公告)号：US10345335B2

公开(公告)日：2019-07-09

申请号：US15937306

申请日：2018-03-27

Applicant: Hitachi High-Tech Science Corporation

Inventor： Masatsugu Shigeno ,  Kazutoshi Watanabe ,  Hiroyoshi Yamamoto

IPC: G01Q10/04 ,  G01Q60/34

Abstract: A scanning probe microscope has a cantilever having a probe at a tip of the cantilever, a driving unit that performs a separating operation for separating one of the sample and the probe from the other at a speed exceeding a response speed of the cantilever from a state where the probe is in contact with the surface of the sample, a determination unit that determines that the probe is separated from the surface of the sample when vibration of the cantilever at a predetermined amplitude is detected at a resonant frequency of the cantilever during the separating operation, and a driving control unit that stops the separating operation when the determination unit determines that the probe is separated from the surface of the sample and relatively moves the probe and the sample to a position where the probe is located on a next measuring point of the sample.