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公开(公告)号:US07529074B2
公开(公告)日:2009-05-05
申请号:US11443246
申请日:2006-05-31
IPC分类号: H02H1/00
CPC分类号: H05F3/06 , B65G49/061 , B65G2249/02 , H05K9/0067
摘要: The present invention provides a charge neutralizer for accurately irradiating a soft X ray into a narrow gap after a glass substrate is lifted up.A soft X ray is introduced into a gap “d” from a soft X ray charge neutralizer 14, and the soft X ray is detected by a soft X ray optical axis monitor 16. Mounting position adjusting means 15 is adjusted by a detection output from said soft X ray optical axis monitor, and optical axis alignment is performed. Next, according to information from a database 19, a control unit 17 controls gap adjusting means 13, and charge neutralization is performed. Charge neutralization can also be performed by controlling the gap “d” by the gap adjusting means 13 while judging neutralizing conditions as to whether a charged potential measured by an electrometer 18 is within an allowable value by the control unit 17 or not.
摘要翻译: 本发明提供一种电荷中和剂,用于在将玻璃基板提起之后将软X射线精确地照射到窄间隙中。 软X射线从软X射线电荷中和器14引入间隙“d”,软X射线由软X射线光轴监视器16检测。安装位置调整装置15通过来自 所述软X射线光轴监视器和光轴对准被执行。 接下来,根据来自数据库19的信息,控制单元17控制间隙调节装置13,并执行电荷中和。 还可以通过间隙调节装置13控制间隙“d”,同时判断由静电计18测量的带电电位是否在控制单元17的允许值内的中和条件来执行电荷中和。
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公开(公告)号:US20070188970A1
公开(公告)日:2007-08-16
申请号:US11443246
申请日:2006-05-31
IPC分类号: H02H1/00
CPC分类号: H05F3/06 , B65G49/061 , B65G2249/02 , H05K9/0067
摘要: The present invention provides a charge neutralizer for accurately irradiating a soft X ray into a narrow gap after a glass substrate is lifted up. A soft X ray is introduced into a gap “d” from a soft X ray charge neutralizer 14, and the soft X ray is detected by a soft X ray optical axis monitor 16. Mounting position adjusting means 15 is adjusted by a detection output from said soft X ray optical axis monitor, and optical axis alignment is performed. Next, according to information from a database 19, a control unit 17 controls gap adjusting means 13, and charge neutralization is performed. Charge neutralization can also be performed by controlling the gap “d” by the gap adjusting means 13 while judging neutralizing conditions as to whether a charged potential measured by an electrometer 18 is within an allowable value by the control unit 17 or not.
摘要翻译: 本发明提供一种电荷中和剂,用于在将玻璃基板提起之后将软X射线精确地照射到窄间隙中。 软X射线从软X射线电荷中和器14引入间隙“d”,软X射线由软X射线光轴监视器16检测。安装位置调整装置15通过来自 所述软X射线光轴监视器和光轴对准被执行。 接下来,根据来自数据库19的信息,控制单元17控制间隙调节装置13,并执行电荷中和。 还可以通过间隙调节装置13控制间隙“d”,同时判断由静电计18测量的带电电位是否在控制单元17的允许值内的中和条件来执行电荷中和。
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公开(公告)号:US06977002B2
公开(公告)日:2005-12-20
申请号:US10197862
申请日:2002-07-19
IPC分类号: C01B3/32 , B01B1/00 , B01J8/04 , B01J19/00 , B60L11/18 , C01B3/38 , H01M8/04 , H01M8/06 , H01M8/10 , B10J7/00
CPC分类号: C01B3/386 , B01B1/005 , B01J8/0438 , B01J19/0013 , B01J2208/0053 , B01J2208/00548 , B01J2208/00716 , B01J2208/025 , B01J2219/00063 , B01J2219/00069 , B01J2219/002 , B01J2219/00213 , B01J2219/00231 , B60L11/1885 , B60L11/1892 , B60L11/1894 , C01B2203/0244 , C01B2203/047 , C01B2203/066 , C01B2203/0844 , C01B2203/1005 , C01B2203/1076 , C01B2203/143 , C01B2203/1604 , C01B2203/82 , Y02P20/129 , Y02T90/34
摘要: A reforming catalyst is composed of a plurality of catalyst layers arranged in series, and when started from a low temperature, preheated air is supplied in parallel to a point upstream of each catalyst layer, thereby the catalyst in each layer is self-heated simultaneously so that the catalyst is heated. After the catalyst is heated, feed of air is temporarily stopped, and supply of fuel gas is started. Next, air is supplied while controlling its flow rate so that temperatures in the catalyst do not exceed the temperature that the catalyst can withstand. Thus, no other special equipment is needed, and the catalyst can be started quickly (cold start). The catalyst can be made compact enough to install it in a electric vehicle.
摘要翻译: 重整催化剂由多个串联排列的催化剂层组成,当从低温开始时,预热的空气与每个催化剂层的上游相平行地供给,由此,各层的催化剂同时自热 催化剂被加热。 催化剂加热后,暂时停止供给空气,开始供给燃料气体。 接下来,在控制其流量的同时供给空气,使得催化剂中的温度不超过催化剂可承受的温度。 因此,不需要其他特殊设备,催化剂可以快速启动(冷启动)。 催化剂可以制得足够紧凑以将其安装在电动车辆中。
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