公开(公告)号：US07107847B2

公开(公告)日：2006-09-19

申请号：US10867701

申请日：2004-06-16

申请人： Hitoshi Yoshida ,  Kazushi Kataoka ,  Hisakazu Miyajima ,  Sumio Akai ,  Daisuke Wakabayashi ,  Koji Goto ,  Makoto Morii

发明人： Hitoshi Yoshida ,  Kazushi Kataoka ,  Hisakazu Miyajima ,  Sumio Akai ,  Daisuke Wakabayashi ,  Koji Goto ,  Makoto Morii

IPC分类号： G01P15/12

CPC分类号： G01P15/18 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0842

摘要： A semiconductor acceleration sensor comprises: a frame having an opening inside thereof; flexible beams extending from the frame to the inside of the opening of the frame; a weight suspended from and supported by the beams so that the weight can freely move; piezoresistors to be mounted on the beams and to vary the resistance values in response to accelerations which work on the piezoresistors. The frame comprises damper plate portions, each of which covers a part of the opening spanning from a corner portion of two neighboring sides of the frame on the side of the opening to the inside of the opening, and each of which serves serve as a stopper to limit movement of the weight. The weight has corner portions which face the corner portions, respectively, and each of which is chamfered to have a shape of arc or a polygonal line consisting of at least three sides as seen in plan view. Thereby, the breaking strength of each stopper is increased, and hence a semiconductor acceleration sensor having superior shock resistance can be obtained.

摘要翻译： 半导体加速度传感器包括：在其内部具有开口的框架; 从框架延伸到框架的开口的内部的柔性梁; 由梁悬挂和支撑的重物，使重物能自由移动; 压敏电阻器被安装在光束上并且响应于在压敏电阻器上工作的加速度来改变电阻值。 框架包括阻尼板部分，每个阻挡板部分覆盖从开口至开口内侧的框架的两个相邻侧的角部的开口的一部分，每个开口用作止动件 限制重量的移动。 该重量具有分别面对拐角部分的角部，并且如平面图所示，每个角部被倒角成具有由至少三个侧面组成的弧形或多边形线。 因此，每个制动器的断裂强度增加，因此可以获得具有优异抗冲击性的半导体加速度传感器。