公开(公告)号：US09476712B2

公开(公告)日：2016-10-25

申请号：US13956048

申请日：2013-07-31

Applicant: Honeywell International Inc.

Inventor： Timothy J. Hanson ,  Mark W. Weber ,  Max C. Glenn ,  Drew A. Karnick

IPC: G01C19/56 ,  G01C19/574 ,  G01C19/5783 ,  G01P15/08

CPC classification number: G01C19/574 ,  G01C19/5783 ,  G01P2015/0871 ,  Y10T29/49002

Abstract: A micro-electro-mechanical systems (MEMS) device comprises at least one proof mass configured to have a first voltage and a motor motion in a first horizontal direction. At least one sense plate is separated from the proof mass by a sense gap, with the sense plate having an inner surface facing the proof mass and a second voltage different than the first voltage. A set of stop structures are on the inner surface of the sense plate and are electrically isolated from the sense plate. The stop structures are configured to prevent contact of the inner surface of the sense plate with the proof mass in a vertical direction. The stop structures have substantially the same voltage as that of the proof mass, and are dimensioned to minimize energy exchange upon contact with the proof mass during a shock or acceleration event.

Abstract translation: 微机电系统（MEMS）装置包括配置成在第一水平方向具有第一电压和电机运动的至少一个检验质量块。 至少一个感测板通过感测间隙与检测质量分离，感测板具有面向校准质量块的内表面和与第一电压不同的第二电压。 一组停止结构位于感测板的内表面上并且与感测板电隔离。 止动结构被构造成防止感测板的内表面与检验块在垂直方向上的接触。 停止结构具有与证明质量块基本上相同的电压，并且其尺寸被设计成使得在冲击或加速事件期间与证明块接触时的能量交换最小化。

公开(公告)号：US20150033849A1

公开(公告)日：2015-02-05

申请号：US13956048

申请日：2013-07-31

Applicant: Honeywell International Inc.

Inventor： Timothy J. Hanson ,  Mark W. Weber ,  Max C. Glenn ,  Drew A. Karnick

IPC: G01C19/56 ,  G01C25/00

CPC classification number: G01C19/574 ,  G01C19/5783 ,  G01P2015/0871 ,  Y10T29/49002

Abstract: A micro-electro-mechanical systems (MEMS) device comprises at least one proof mass configured to have a first voltage and a motor motion in a first horizontal direction. At least one sense plate is separated from the proof mass by a sense gap, with the sense plate having an inner surface facing the proof mass and a second voltage different than the first voltage. A set of stop structures are on the inner surface of the sense plate and are electrically isolated from the sense plate. The stop structures are configured to prevent contact of the inner surface of the sense plate with the proof mass in a vertical direction. The stop structures have substantially the same voltage as that of the proof mass, and are dimensioned to minimize energy exchange upon contact with the proof mass during a shock or acceleration event.

Abstract translation: 微机电系统（MEMS）装置包括配置成在第一水平方向具有第一电压和电机运动的至少一个检验质量块。 至少一个感测板通过感测间隙与检测质量分离，感测板具有面向校准质量块的内表面和与第一电压不同的第二电压。 一组停止结构位于感测板的内表面上并且与感测板电隔离。 止动结构被构造成防止感测板的内表面与检验块在垂直方向上的接触。 停止结构具有与证明质量块基本上相同的电压，并且其尺寸被设计成使得在冲击或加速事件期间与证明块接触时的能量交换最小化。