公开(公告)号：US06685800B2

公开(公告)日：2004-02-03

申请号：US10003195

申请日：2001-11-14

申请人： Hong Seub Kim ,  Gi Chung Kwon ,  Sun Seok Han ,  Choong Won Lee ,  Sung Weon Lee ,  Hong Sik Byun

发明人： Hong Seub Kim ,  Gi Chung Kwon ,  Sun Seok Han ,  Choong Won Lee ,  Sung Weon Lee ,  Hong Sik Byun

IPC分类号： C23C1600

CPC分类号： H01J37/32522 ,  H01J37/321

摘要： Disclosed is an apparatus for generating ICP, which has a heater having a hot wire as a heating source for heating elements in a chamber and inner wall of the chamber and also efficiently transfers heat of the heater through a heat transferring gas to the elements in the chamber and the inner wall of the chamber. According to the present invention, the elements in the chamber and the inner wall of the chamber can be heated up to a temperature of about 200° C., thereby reducing the adhesion of the by-product served as the source generating the undesirable particles. In addition, since the hot wire having a longer life span than the halogen lamp is used as heat radiating means, the life span of the apparatus is also increased.

摘要翻译： 公开了一种用于产生ICP的装置，其具有加热器，该加热器具有热丝作为加热室，用于加热腔室中的元件和腔室的内壁，并且还通过传热气体将加热器的热量有效地传递到 室和室的内壁。 根据本发明，室中的元件和室的内壁可被加热至约200℃的温度，从而降低了作为产生不期望的颗粒的源的副产物的粘附。 此外，由于使用寿命比卤素灯长的热丝作为散热装置，因此装置的使用寿命也增加。