公开(公告)号：US06730922B2

公开(公告)日：2004-05-04

申请号：US10237899

申请日：2002-09-10

申请人： Hsi-Hsiang Lin ,  Chien-Yang Chen

发明人： Hsi-Hsiang Lin ,  Chien-Yang Chen

IPC分类号： H01J3708

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J2237/31769

摘要： An electron anti-reflection arrangement includes a substrate, an electron resistant layer formed on a top side of the substrate, and an electron anti-reflective layer provided in between the substrate and the electron resistant layer for enabling an electron beam to pass to the inside of the substrate in an incident direction and minimizing the amount of electrons of the electron beam that return to the electron resistant layer after reflection by the substrate.

摘要翻译： 电子抗反射装置包括基板，形成在基板的上侧的电子阻挡层和设置在基板和电子阻挡层之间的电子抗反射层，用于使电子束能够通向内部 并且使由基板反射回到电子阻挡层的电子束的电子量最小化。

公开(公告)号：US06508110B1

公开(公告)日：2003-01-21

申请号：US09716283

申请日：2000-11-21

申请人： Hsi-Hsiang Lin ,  Shih-Che Lo

发明人： Hsi-Hsiang Lin ,  Shih-Che Lo

IPC分类号： G01B734

CPC分类号： G01Q60/34 ,  Y10S977/851

摘要： A tapping mode atomic force microscope includes a sinusoidal signal generator. The sinusoidal signal generator generates sinusoidal wave signals to a modulating laser diode for outputting a pulsed laser beam. The laser beam reflects from the back side of a photo detector and then a current signal with a corresponding intensity is output b y the photo detector. Then, the signal is converted by a current to voltage converter and then is operated by a differential amplifier. After the DC component and the undesired multiple frequency harmonics of the current signal is filtered by a band pass filter, the current signal is processed by a demodulation circuit and a low pass filter to produce a voltage value corresponding to probe deformation. After inputting this voltage value to a Z-axis servo controller, a corresponding control command is acquired based on a control algorithm so as to keep the value of the probe deformation constant. If the position of the Z-axis is recorded at a specific time point and all the data are collected, the surface profile of the test sample can be obtained.

摘要翻译： 敲击模式原子力显微镜包括正弦信号发生器。 正弦信号发生器产生正弦波信号到调制激光二极管，用于输出脉冲激光束。 激光束从光电检测器的背面反射，然后输出具有相应强度的电流信号。 然后，信号由电流转换为电压转换器，然后由差分放大器操作。 在通过带通滤波器对电流信号的直流分量和不需要的多次谐波进行滤波之后，由解调电路和低通滤波器对电流信号进行处理，以产生与探头变形相对应的电压值。 在将该电压值输入到Z轴伺服控制器之后，基于控制算法获取相应的控制命令，以使探头的值保持恒定。 如果在特定时间点记录Z轴的位置并且收集所有数据，则可以获得测试样品的表面轮廓。