公开(公告)号：US08387160B2

公开(公告)日：2013-02-26

申请号：US12899817

申请日：2010-10-07

申请人： Michel Despont ,  Urs T. Duerig ,  Jane E. Frommer ,  Bernd W. Gotsmann ,  James L. Hedrick ,  Craig Jon Hawker ,  Robert D. Miller

发明人： Michel Despont ,  Urs T. Duerig ,  Jane E. Frommer ,  Bernd W. Gotsmann ,  James L. Hedrick ,  Craig Jon Hawker ,  Robert D. Miller

IPC分类号： G01Q60/24

CPC分类号： G03F7/0002 ,  G01Q80/00 ,  Y10S977/849 ,  Y10S977/85 ,  Y10S977/851 ,  Y10S977/855 ,  Y10S977/857

摘要： A resist medium in which features are lithographically produced by scanning a surface of the medium with an AFM probe positioned in contact therewith. The resist medium comprises a substrate; and a polymer resist layer within which features are produced by mechanical action of the probe. The polymer contains thermally reversible crosslinkages. Also disclosed are methods that generally includes scanning a surface of the polymer resist layer with an AFM probe positioned in contact with the resist layer, wherein heating the probe and a squashing-type mechanical action of the probe produces features in the layer by thermally reversing the crosslinkages.

摘要翻译： 抗蚀剂介质，其特征是通过用与其接触的AFM探针扫描介质的表面来光刻制造。 抗蚀剂介质包括基底; 以及聚合物抗蚀剂层，其中通过探针的机械作用产生特征。 聚合物含有热可逆交联。 还公开了通常包括用定位成与抗蚀剂层接触的AFM探针扫描聚合物抗蚀剂层的表面的方法，其中加热探针和探针的挤压型机械作用通过热反转来产生该层中的特征 交联。

公开(公告)号：US20090230320A1

公开(公告)日：2009-09-17

申请号：US12474364

申请日：2009-05-29

申请人： Takao Kusaka ,  Nobuki Yoshimatsu ,  Susumu Yasuda ,  Junichi Seki

发明人： Takao Kusaka ,  Nobuki Yoshimatsu ,  Susumu Yasuda ,  Junichi Seki

IPC分类号： G21K5/10 ,  G01N13/10

CPC分类号： G01Q70/04 ,  G01Q10/04 ,  Y10S977/849 ,  Y10S977/85 ,  Y10S977/851

摘要： In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.

摘要翻译： 在替代样品保持台或探针的同时能够始终有效地抵消惯性力以抑制振动的扫描探针装置中，用于样品或探针的载物台包括用于移动样品保持台并可移动的驱动元件 可在样品保持台移动期间产生的惯性力的方向移动的部分。 台架构造为使得驱动元件，可移动部分和样品保持台或探针可整体地可拆卸地安装在扫描探针装置的主组件上。

公开(公告)号：US07578853B2

公开(公告)日：2009-08-25

申请号：US11631439

申请日：2005-07-01

申请人： Tatsuya Hattori ,  Pu Qian

发明人： Tatsuya Hattori ,  Pu Qian

IPC分类号： G01N13/10

CPC分类号： G01Q30/20 ,  G01Q70/10 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/86 ,  Y10S977/872 ,  Y10S977/873

摘要： A scanning probe microscope system comprising a hollow probe 3, a tube 4 connected to a rear end 32 of the hollow probe 3, a support table 1 provided under the hollow probe 3, and a substrate 2 and a means 5 for washing the hollow probe 3 that are fixed to the support table 1, a sample S passing through the tube 4 and the hollow probe 3, and the substrate 2 and the washing means 5 being moved by the support table 1 such that each of them opposes the hollow probe 3.

摘要翻译： 一种扫描探针显微镜系统，包括中空探针3，连接到中空探针3的后端32的管4，设置在中空探针3下方的支撑台1和基底2以及用于清洗中空探针的装置5 3，固定到支撑台1，通过管4和中空探针3的样品S以及基板2和洗涤装置5被支撑台1移动，使得它们各自与中空探针3相对 。

公开(公告)号：US07569817B2

公开(公告)日：2009-08-04

申请号：US11612104

申请日：2006-12-18

申请人： Takao Kusaka ,  Nobuki Yoshimatsu ,  Susumu Yasuda ,  Junichi Seki

发明人： Takao Kusaka ,  Nobuki Yoshimatsu ,  Susumu Yasuda ,  Junichi Seki

IPC分类号： H01J37/20 ,  G12B21/24 ,  G01N13/10

CPC分类号： G01Q70/04 ,  G01Q10/04 ,  Y10S977/849 ,  Y10S977/85 ,  Y10S977/851

摘要： In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.

摘要翻译： 在替代样品保持台或探针的同时能够始终有效地抵消惯性力以抑制振动的扫描探针装置中，用于样品或探针的载物台包括用于移动样品保持台并可移动的驱动元件 可在样品保持台移动期间产生的惯性力的方向移动的部分。 台架构造为使得驱动元件，可移动部分和样品保持台或探针可整体地可拆卸地安装在扫描探针装置的主组件上。

公开(公告)号：US07511269B2

公开(公告)日：2009-03-31

申请号：US11208830

申请日：2005-08-22

申请人： Masanao Munekane

发明人： Masanao Munekane

IPC分类号： G01N23/00

CPC分类号： G01N23/04 ,  G01N1/32 ,  H01J2237/31749 ,  Y10S977/851 ,  Y10S977/881

摘要： A method of approaching a probe to a target position on a sample mounted on a sample stage tilted at a preselected tilt angle about a tilt axis of the sample stage. A distance between the tip of the probe and the target position of the sample is observed with a charged particle beam microscope while approaching the tip of the probe to the target position on the sample. The probe is moved in a direction so that on a display of the charged particle beam microscope, the tip of the probe and the tip of a shadow of the probe on the sample coincide at the target position on the sample.

摘要翻译： 将探针接近安装在样品台上的样品上的目标位置的方法，其以围绕样品台的倾斜轴线的预选倾斜角度倾斜。 使用带电粒子束显微镜观察探针的尖端与样品的目标位置之间的距离，同时将探针的尖端接近样品的目标位置。 探针沿一个方向移动，使得在带电粒子束显微镜的显示器上，探针的尖端和样品上的探针阴影的尖端与样品上的目标位置重合。

公开(公告)号：US20080017809A1

公开(公告)日：2008-01-24

申请号：US11631439

申请日：2005-07-01

申请人： Tatsuya Hattori ,  Pu Qian

发明人： Tatsuya Hattori ,  Pu Qian

IPC分类号： G01N13/10

CPC分类号： G01Q30/20 ,  G01Q70/10 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/86 ,  Y10S977/872 ,  Y10S977/873

摘要： A scanning probe microscope system comprising a hollow probe 3, a tube 4 connected to a rear end 32 of the hollow probe 3, a support table 1 provided under the hollow probe 3, and a substrate 2 and a means 5 for washing the hollow probe 3 that are fixed to the support table 1, a sample S passing through the tube 4 and the hollow probe 3, and the substrate 2 and the washing means 5 being moved by the support table 1 such that each of them opposes the hollow probe 3.

摘要翻译： 一种扫描探针显微镜系统，包括中空探针3，连接到中空探针3的后端32的管4，设置在中空探针3下方的支撑台1和基底2以及用于清洗中空探针的装置5 3，固定到支撑台1，通过管4和中空探针3的样品S以及基板2和洗涤装置5被支撑台1移动，使得它们各自与中空探针3相对 。

公开(公告)号：US20070158559A1

公开(公告)日：2007-07-12

申请号：US11612104

申请日：2006-12-18

申请人： Takao KUSAKA ,  Nobuki YOSHIMATSU ,  Susumu YASUDA ,  Junichi Seki

发明人： Takao KUSAKA ,  Nobuki YOSHIMATSU ,  Susumu YASUDA ,  Junichi Seki

IPC分类号： G21K7/00

CPC分类号： G01Q70/04 ,  G01Q10/04 ,  Y10S977/849 ,  Y10S977/85 ,  Y10S977/851

摘要： In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.

摘要翻译： 在替代样品保持台或探针的同时能够始终有效地抵消惯性力以抑制振动的扫描探针装置中，用于样品或探针的载物台包括用于移动样品保持台并可移动的驱动元件 可在样品保持台移动期间产生的惯性力的方向移动的部分。 台架构造为使得驱动元件，可移动部分和样品保持台或探针可整体地可拆卸地安装在扫描探针装置的主组件上。

公开(公告)号：US07198961B2

公开(公告)日：2007-04-03

申请号：US10813372

申请日：2004-03-30

申请人： Ming Li ,  Makoto Ishizuka ,  Chen-Hsiung Cheng

发明人： Ming Li ,  Makoto Ishizuka ,  Chen-Hsiung Cheng

IPC分类号： H01L21/00

CPC分类号： B81C1/00492 ,  B81C99/0065 ,  G01Q60/22 ,  G01Q80/00 ,  Y10S977/851

摘要： A method for manufacturing a microstructure, which includes at least one fine feature on an existing feature, using an NSOM laser micromachining system. A microstructure device preform is provided. A portion of its top surface is profiled with the NSOM to produce a topographical image. This profiled portion is selected to include the existing feature. An image coordinate system is defined for the profiled portion of top surface based on the topographical image. Coordinates of a reference point and the orientation of the existing feature in the image coordinate system are determined using the topographical image. The probe tip of the NSOM is aligned over a portion of the existing feature using the determined coordinates of the reference point and the orientation of the existing feature. The top surface of the microstructure device preform is machined with the micro-machining laser to form the fine feature(s) on the existing feature.

摘要翻译： 一种使用NSOM激光微加工系统制造微结构的方法，其包括现有特征上的至少一个精细特征。 提供微结构器件预制件。 其顶表面的一部分与NSOM成型以形成地形图像。 该分析部分被选择为包括现有特征。 基于地形图像为顶面的成型部分定义图像坐标系。 使用地形图像确定参考点的坐标和图像坐标系中现有特征的方位。 使用确定的参考点的坐标和现有特征的方向，使NSOM的探针尖端对准现有特征的一部分。 用微型加工激光加工微结构器件预制件的上表面，以形成现有特征的精细特征。

公开(公告)号：US20050262931A1

公开(公告)日：2005-12-01

申请号：US11192808

申请日：2005-07-28

申请人： Thomas McWaid ,  Peter Panagas ,  Steven Eaton ,  Amin Samsavar ,  William Wheeler

发明人： Thomas McWaid ,  Peter Panagas ,  Steven Eaton ,  Amin Samsavar ,  William Wheeler

IPC分类号： G01Q70/08 ,  G01B3/00 ,  G01B5/28 ,  G01B7/34 ,  G01B21/20 ,  G01B21/30 ,  G01Q10/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q60/38 ,  G01Q70/00 ,  G01Q70/06 ,  G01Q70/12 ,  G01Q90/00 ,  G01N13/10

CPC分类号： G01B3/008 ,  G01B7/34 ,  G01Q10/06 ,  G01Q60/34 ,  Y10S977/851

摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.

摘要翻译： 扫描仪或扫描探针显微镜可以跨样品表面进行扫描，其间的距离被控制以允许感测尖端间歇地接触表面，以便找到并测量感兴趣的特征。 控制距离使得当感测尖端升高或降低以接触样品表面时，尖端和样品之间没有横向相对运动。 这可以防止尖端损坏。 可以提供或测量样品表面的高度分布的先前知识并且用于最初定位感测尖端或者用于控制分离以避免尖端和样品之间的横向接触。 该过程也可以分两部分执行：快速查找模式以查找特征，以及随后的测量模式来测量特征。 还可以通过选择横向相对运动的步骤来小于100纳米，以减少尖端损伤的可能性来执行快速步进模式。 在该模式中，在每个垂直步骤之后，增加尖端和样品之间的间隔，检测尖端和样品是否接触。 如果它们在垂直步骤之后仍然接触，则采取一个或多个垂直步骤来增加分离，并且不采取垂直步骤来减小分离，并且不会引起横向相对运动，直到确定尖端和样品 不再联系。

公开(公告)号：US20050221577A1

公开(公告)日：2005-10-06

申请号：US10813372

申请日：2004-03-30

申请人： Ming Li ,  Makoto Ishizuka ,  Chen-Hsiung Cheng

发明人： Ming Li ,  Makoto Ishizuka ,  Chen-Hsiung Cheng

IPC分类号： B23K26/06 ,  B81C1/00 ,  B81C99/00 ,  G01Q10/04 ,  G01Q40/00 ,  G01Q60/18 ,  G01Q60/22 ,  G01Q80/00 ,  H01L21/76

CPC分类号： B81C1/00492 ,  B81C99/0065 ,  G01Q60/22 ,  G01Q80/00 ,  Y10S977/851

摘要： A method for manufacturing a microstructure, which includes at least one fine feature on an existing feature, using an NSOM laser micromachining system. A microstructure device preform is provided. A portion of its top surface is profiled with the NSOM to produce a topographical image. This profiled portion is selected to include the existing feature. An image coordinate system is defined for the profiled portion of top surface based on the topographical image. Coordinates of a reference point and the orientation of the existing feature in the image coordinate system are determined using the topographical image. The probe tip of the NSOM is aligned over a portion of the existing feature using the determined coordinates of the reference point and the orientation of the existing feature. The top surface of the microstructure device preform is machined with the micro-machining laser to form the fine feature(s) on the existing feature.

摘要翻译： 一种使用NSOM激光微加工系统制造微结构的方法，其包括现有特征上的至少一个精细特征。 提供微结构器件预制件。 其顶表面的一部分与NSOM成型以形成地形图像。 该分析部分被选择为包括现有特征。 基于地形图像为顶面的成型部分定义图像坐标系。 使用地形图像确定参考点的坐标和图像坐标系中现有特征的方位。 使用确定的参考点的坐标和现有特征的方向，使NSOM的探针尖端对准现有特征的一部分。 用微型加工激光加工微结构器件预制件的上表面，以形成现有特征的精细特征。