公开(公告)号：US08189183B2

公开(公告)日：2012-05-29

申请号：US12580619

申请日：2009-10-16

申请人： Hsueh-Ching Shih ,  Jia-Huey Tsao ,  Chih-Cheng Feng ,  Chun-Lin Chiang ,  Chun-Min Su ,  Kuo-Chi Chiu

发明人： Hsueh-Ching Shih ,  Jia-Huey Tsao ,  Chih-Cheng Feng ,  Chun-Lin Chiang ,  Chun-Min Su ,  Kuo-Chi Chiu

IPC分类号： G01N21/01 ,  G01N21/55 ,  G01M19/00

CPC分类号： G01N21/553 ,  G01N21/01

摘要： An optical inspection apparatus capable of adjusting an incident angle of a detected light beam and adjusting a detecting angle for detecting the detected light beam. A driving mechanism is used to actuate two arms having a light source and a detector disposed thereon respectively to conduct a relative movement between the two arms so as to control the incident angle and the detecting angle. By means of the embodiments, mechanism for adjusting the angle is simplified so that the apparatus is capable of being adapted to combine with the application of micro sensors such that practicality of modularization design and microminiaturization and convenience of operation are capable of being greatly improved and that the cost can be reduced.

摘要翻译： 一种光学检查装置，其能够调整检测光束的入射角度并调整检测角度以检测检测到的光束。 驱动机构用于致动具有光源的两个臂和分别布置在其上的检测器，以在两个臂之间进行相对移动，以便控制入射角和检测角度。 通过这些实施例，简化了用于调节角度的机构，使得该装置能够适应于微型传感器的应用，使得模块化设计和微型化以及操作方便性的实用性能够大大提高，并且 可以降低成本。