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公开(公告)号:US20250071401A1
公开(公告)日:2025-02-27
申请号:US18725405
申请日:2022-11-29
Applicant: Huawei Technologies Co., Ltd.
Inventor: Xiaoshi Dong , Jun Feng , Huaiyuan Chu , Jinghui Xu
Abstract: In accordance with an embodiment, a drive apparatus includes a substrate, a first movable structure, a second movable structure, a first fastening structure, a second fastening structure, a first connecting piece, a second connecting piece, and a drive structure. The first fastening structure is fastened to the substrate, and the first movable structure is connected to the first fastening structure by using the first connecting piece. The second movable structure is connected to the second fastening structure by using the second connecting piece, and the second movable structure is fastened to the first movable structure. A thickness of a first area on the first fastening structure is less than a thickness of a second area. A thickness of a third area on the second fastening structure is less than a thickness of a fourth area.
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公开(公告)号:US20240204693A1
公开(公告)日:2024-06-20
申请号:US18591610
申请日:2024-02-29
Applicant: Huawei Technologies Co., Ltd.
Inventor: Fengpei Sun , Zhihong Feng , Jinghui Xu , Xiaoshi Dong , Jianbo Sun
CPC classification number: H02N1/002 , G02B26/0833
Abstract: An actuating member and a related device are provided, and may be applied to an optical communication scenario such as OXC, VOA, or WSS, or the field of projection display. A first fastening structure (11), a second fastening structure (12), and a third fastening structure (13) are fastened to a substrate. A rotating frame (40) is connected to the first fastening structure (11) by using a first cantilever beam (21), and a first comb (31) is formed on the rotating frame (40). The first comb (31) is arranged in a staggered manner with a second comb (32), and the second comb (32) is formed on the second fastening structure (12). A rotating platform (60) is located at an inner side of the rotating frame (40), the rotating platform (60) is connected to the rotating frame (40) by using a second cantilever beam (22).
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公开(公告)号:US20240019687A1
公开(公告)日:2024-01-18
申请号:US18477744
申请日:2023-09-29
Applicant: Huawei Technologies Co., Ltd.
Inventor: Xiaoshi Dong , Jinghui Xu , Fengpei Sun
CPC classification number: G02B26/0841 , B81B7/02 , B81B2203/0136 , B81B2201/033 , B81B2201/042 , B81B2201/045
Abstract: An electrostatic MEMS micromirror is provided, and may be used in a device such as a mobile phone, a microphone, a camera, a radar, or an optical switch. The electrostatic MEMS micromirror includes a support beam, a micromirror, and a drive component. The drive component includes a comb frame and a drive comb located in the comb frame. The support beam and the micromirror are mechanically coupled using the comb frame. Two sides of the comb frame that are mechanically coupled to the micromirror are separately located on two sides of a rotating axis determined by the support beam. The drive comb includes at least one comb pair. The comb pair includes a movable comb structure and a stationary comb structure. The movable comb structure includes a plurality of movable combs. One end of the movable comb is fastened to the comb frame.
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