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公开(公告)号:US20230352334A1
公开(公告)日:2023-11-02
申请号:US18006066
申请日:2021-07-20
Applicant: Huawei Technologies Co., Ltd.
Inventor: Haohui Long , Shanshan Wei , Yong She , Jianping Fang
IPC: H01L21/683 , H01L25/075
CPC classification number: H01L21/6835 , H01L25/0753 , H01L2221/68368
Abstract: A chip transfer method includes: first, providing a stretchable layer, where the stretchable layer includes a first cloth layer and a second cloth layer, a plurality of first fibers and a plurality of second fibers located between the first cloth layer and the second cloth layer, and a plurality of intersections exist between the first fiber and the second fiber; sticking the stretchable layer to chips, where the first cloth layer is closer to the chips than the second cloth layer; then, separating a plurality of chips, where the plurality of separated chips are separately connected to the first fiber and the second fiber; respectively disposing, at a plurality of preset locations of the substrate, the plurality of chips stuck to the stretchable layer; and removing the first fiber and the second fiber.