公开(公告)号：US20180163299A1

公开(公告)日：2018-06-14

申请号：US15484134

申请日：2017-04-11

Applicant: Huazhong University of Science and Technology

Inventor： Wenli ZHOU ,  Yu ZHU ,  Changsheng CHEN ,  Yunbo WANG ,  Junxiong GAO

IPC: C23C16/26 ,  C23C16/02 ,  C25D13/02

Abstract: A method for connecting graphene and metal compound electrodes in a carbon nanotube device through carbon-carbon covalent bonds, the method including: 1) providing a substrate, designing and preparing pre-patterned metal membrane electrodes on the substrate; 2) mixing carbon nanotubes with a volatile organic solvent to yield a dispersed suspension solution, disposing the carbon nanotube between the pre-patterned metal membrane electrodes in the dispersed suspension to allow two ends of the carbon nanotube to connect to the metal membrane electrodes, to form a carbon nanotube device; 3) annealing the carbon nanotube device under a mixture of nitrogen and argon, etching, by metal atoms, a part of carbon atoms at two ends of the carbon nanotube connected to the metal membrane electrodes to form notches; and 4) using hydrocarbon gas as a carbon source, and performing a chemical vapor deposition process.