Micro scanner and manufacturing process, driving structure and driving method therefor
    1.
    发明申请
    Micro scanner and manufacturing process, driving structure and driving method therefor 审中-公开
    微型扫描仪和制造工艺,驱动结构及其驱动方法

    公开(公告)号:US20080001690A1

    公开(公告)日:2008-01-03

    申请号:US11650402

    申请日:2007-01-05

    IPC分类号: H01H1/00

    CPC分类号: G02B26/085

    摘要: A method for manufacturing a magnetic-induction element is provided. The method includes steps of: a) providing a substrate, b) forming an adhesive layer on the substrate, c) forming a seed layer on the adhesive layer, d) removing a part of the seed layer to reveal a part of the adhesive layer, e) partially forming a resistance on the seed layer and the revealed part of the adhesive layer, f) forming a magnetic-induction layer on the seed layer and the revealed part of the adhesive layer, g) removing the resistance, and h) removing a part of the substrate and the revealed part of the adhesive layer.

    摘要翻译: 提供一种制造磁感应元件的方法。 该方法包括以下步骤:a)提供衬底,b)在衬底上形成粘合剂层,c)在粘合剂层上形成种子层,d)去除种子层的一部分以露出粘合剂层的一部分 e)部分地在种子层和粘合剂层的显露部分形成电阻,f)在种子层和粘合剂层的显露部分上形成磁感应层,g)去除电阻,以及h) 去除衬底的一部分和粘合剂层的露出部分。