公开(公告)号：US5866800A

公开(公告)日：1999-02-02

申请号：US548387

申请日：1995-10-26

申请人： Hyeon Soo Park ,  Hyun Woo Shin ,  Chul Han Kwon ,  Hyung Ki Hong ,  Dong Hyun Yun ,  Kyuchung Lee ,  Sung Tae Kim

发明人： Hyeon Soo Park ,  Hyun Woo Shin ,  Chul Han Kwon ,  Hyung Ki Hong ,  Dong Hyun Yun ,  Kyuchung Lee ,  Sung Tae Kim

IPC分类号： G01N27/00 ,  G01N27/12 ,  G01N27/26

CPC分类号： G01N27/12

摘要： A gas sensor and a method for fabricating the same includes a semiconductor substrate, a supporting layer formed on the semiconductor substrate, the supporting layer being electrically insulative and having a pattern groove formed therein, a heater formed in the pattern groove, an electrically insulating layer formed on the heater and the supporting layer, an electrode formed on the insulating layer, and a sensing layer formed on the electrode and the insulating layer to detect a target gas of interest according to a measured change in electrical conductivity or resistance thereof.

摘要翻译： 气体传感器及其制造方法包括半导体基板，形成在半导体基板上的支撑层，支撑层是电绝缘的，其中形成有图形槽，形成在图案槽中的加热器，电绝缘层 形成在加热器和支撑层上的电极，形成在绝缘层上的电极，以及形成在电极和绝缘层上的感测层，以根据测量的导电性或电阻的变化来检测目标气体。

公开(公告)号：US5777207A

公开(公告)日：1998-07-07

申请号：US728757

申请日：1996-10-11

申请人： Dong Hyun Yun ,  Kyuchung Lee ,  Chul Han Kwon ,  Hyung-Ki Hong

发明人： Dong Hyun Yun ,  Kyuchung Lee ,  Chul Han Kwon ,  Hyung-Ki Hong

IPC分类号： G01N27/12 ,  G01N33/00 ,  H01L29/66 ,  H01L49/00

CPC分类号： G01N33/0047 ,  G01N27/12

摘要： Air pollution gas sensor which efficiently detects smell from smoking, ordinary stinks such as TMA and CH3SH, smell of Kimchi, acetaldehyde, and etc. and also a method for fabricating the same is revealed and described including a substrate, a heater formed on said substrate, electrodes each formed on said substrate insulated from the heater, and a sensing layer formed of SnO.sub.2, including WO.sub.3 on said substrate including said electrodes, with the method for fabricating the gas sensor including the steps of forming the heater on the substrate, forming the electrodes on the substrate insulated from the heater, and forming a sensing layer of SnO.sub.2 including WO.sub.3 on the substrate including the electrodes.

摘要翻译： 空气污染气体传感器，其有效地检测吸烟的气味，常见的臭味如TMA和CH3SH，泡菜的气味，乙醛等，并且揭示并描述了其制造方法，其包括基底，形成在所述基底上的加热器 在与所述加热器绝缘的所述基板上形成的电极，以及由包括所述电极的所述基板上的包含WO 3的SnO 2形成的感测层，所述气体传感器的制造方法包括在所述基板上形成所述加热器的步骤， 基板上的电极与加热器绝缘，并且在包括电极的基板上形成包括WO 3的SnO 2感测层。