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公开(公告)号:US06859588B2
公开(公告)日:2005-02-22
申请号:US10074528
申请日:2002-02-12
申请人: Hyun-Ki Kim , Moon-Koog Song , Jae-Wan Kim , Jong-Youl Kim
发明人: Hyun-Ki Kim , Moon-Koog Song , Jae-Wan Kim , Jong-Youl Kim
CPC分类号: G02B6/3636 , G02B6/30 , G02B6/3652
摘要: This invention provides an optical fiber block that includes an optical-fiber-alignment portion and a stress-reduction-depth portion. In the optical-fiber-alignment portion, a V groove array is arranged to accommodate the non-coated fiber portion of a ribbon fiber. The V groove array is formed by primary and secondary wet-etching processes on a silicon wafer, and further includes first V grooves at both sides and second V grooves different from the first V grooves disposed between the first V grooves. Meanwhile, the stress-reduction-depth portion is formed by another wet etching, extending to a predetermined depth from the optical-fiber-alignment portion, for reducing stress caused by a variation in the coating thickness of the optical fibers.
摘要翻译: 本发明提供一种光纤块,其包括光纤对准部和应力减少深度部。 在光纤取向部中,配置V槽阵列以容纳带状光纤的未涂覆光纤部分。 V沟槽阵列通过在硅晶片上的初级和次级湿蚀刻工艺形成,并且还包括两侧的第一V槽和与设置在第一V槽之间的第一V槽不同的第二V槽。 同时,通过另一湿法蚀刻形成应力减小深度部分,从光纤取向部延伸至预定深度,以减少由于光纤的涂层厚度变化引起的应力。