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公开(公告)号：US3461842A
公开(公告)日：1969-08-19
申请号：US3461842D
申请日：1965-11-19
Applicant: IBM
Inventor： CONRAD ERNEST E , FINGER ARMIN A
CPC classification number: C03C17/02 , B05C3/09 , H01B3/088 , H01J9/223 , H01L23/3157 , H01L2924/0002 , H01L2924/19041 , H01L2924/00
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