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公开(公告)号：US3367476A
公开(公告)日：1968-02-06
申请号：US57261566
申请日：1966-08-15
Applicant: IBM
Inventor： JESSE ARONSTEIN , CACCOMA GEORGE A
CPC classification number: H01L21/67144 , B07C5/344 , B65G47/1421 , H01L21/68
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