Patent search ap:("IBM") AND inv:"KULCKE WOLFGANG" Page 1

1.

发明授权
Optical registration of an object with reference to a coordinate system 失效
Title translation: 参考对象系统的对象的光学注册

公开(公告)号：US3531196A

公开(公告)日：1970-09-29

申请号：US3531196D

申请日：1967-07-19

Applicant: IBM

Inventor： KOSANKE KURT M , KULCKE WOLFGANG , MAX ERHARD

IPC: G02F1/31 , G03B15/00 , G03F9/00 , H01L21/00 , H01L21/68 , H03K17/78 , G03B27/32

CPC classification number: H03K17/78 , G02F1/31 , G03B15/00 , G03F9/70 , H01L21/00 , H01L21/681

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