-
公开(公告)号:US3426883A
公开(公告)日:1969-02-11
申请号:US3426883D
申请日:1967-07-28
Applicant: IBM
Inventor: ARONSTEIN JESSE , MOZER DONALD T , POLONCIC STANLEY J
IPC: H01L21/677 , H01L21/68 , H05K13/02 , B65G47/24
CPC classification number: H05K13/022 , H01L21/67793 , H01L21/68