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公开(公告)号：US3402366A
公开(公告)日：1968-09-17
申请号：US43547665
申请日：1965-02-26
Applicant: IBM
Inventor： WILLIAMS HOWARD B , SHAH BANKIM R
CPC classification number: H01L33/00 , H01S5/0425 , H01S5/06243 , H01S5/06251 , H01S5/1082
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