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公开(公告)号：US3507036A
公开(公告)日：1970-04-21
申请号：US3507036D
申请日：1968-01-15
Applicant: IBM
Inventor： ANTIPOV IGOR , FEINBERG IRVING , ZANDE CHARLES H VAN DE , WING WAILEY L , BERGER HORST H
IPC: H01L23/544 , H01L7/02
CPC classification number: H01L22/34
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