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公开(公告)号：US10833056B2
公开(公告)日：2020-11-10
申请号：US16222301
申请日：2018-12-17
申请人： IHP GmbH—Innovations for High Performance Microelectronics/Leibniz-Institut fur Innovative Mikroelektronik , Technische Hochschule Wildau
发明人： Patrick Steglich , Andreas Mai , Christian Mai , Sigurd Schrader
IPC分类号： H01L31/048 , H01L31/18 , H01L25/16 , G02F1/035 , G02F1/025 , H01L23/31 , G02F1/361 , G02F1/065 , H01L31/049 , G02B6/122 , H01L25/065 , H01L27/146 , H01L23/66
摘要： The invention relates to an electrooptical device comprising a semiconductor substrate having a front side and a back side, at least one photonic component arranged on the front side of the semiconductor substrate, the photonic component comprising an active layer made of a non-linear optical material, wherein at least one cavity, extends through the semiconductor substrate and connects the active layer on the front side of the semiconductor substrate with the back side of the semiconductor substrate.
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公开(公告)号：US11988939B2
公开(公告)日：2024-05-21
申请号：US17590909
申请日：2022-02-02
发明人： Andreas Mai , Patrick Steglich , Christian Mai
CPC分类号： G02F1/2257 , G02F1/0027 , G02F1/025 , G02F1/035 , G02B2006/12097 , G02B6/136 , G02F2201/122
摘要： The present invention relates to producing an electro-optical phase shifter such that it may be integrated into a front-end of line of an electronic-photonic integrated circuit. A conducting bottom layer with a first refractive index is provided. A center layer including a ferroelectric material and with a second refractive index is provided on top of a first region of the conducting bottom layer, such that the center layer is not on top of a second region of the conducting bottom layer. A conducting top layer with a third refractive index is provided on top of the center layer. The second refractive index is lower than the first refractive index and lower than the third refractive index, such that the conducting bottom layer, the center layer, and the conducting top layer form a slot waveguide. A first electrical connector which connects the second region of the conducting bottom layer with an upper layer is provided. Additionally, a second electrical connector which connects the conducting top layer with the upper layer is provided. A first electrode and a second electrode are provided in the upper layer such that the first electrode connects to the second region of the conducting bottom layer via the first electrical connector and the second electrode connects to the conducting top layer via the second electrical connector.
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公开(公告)号：US20190206850A1
公开(公告)日：2019-07-04
申请号：US16222301
申请日：2018-12-17
申请人： IHP GmbH - Innovations for High Performance Microelectronics/Leibniz-Institut fur Innovative M , Technische Hochschule Wildau
发明人： Patrick Steglich , Andreas Mai , Christian Mai , Sigurd Schrader
IPC分类号： H01L25/16 , G02B6/122 , H01L23/31 , H01L25/065 , H01L27/146
摘要： The invention relates to an electrooptical device comprising a semiconductor substrate having a front side and a back side, at least one photonic component arranged on the front side of the semiconductor substrate, the photonic component comprising an active layer made of a non-linear optical material, wherein at least one cavity, extends through the semiconductor substrate and connects the active layer on the front side of the semiconductor substrate with the back side of the semiconductor substrate.
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