公开(公告)号：US20200208958A1

公开(公告)日：2020-07-02

申请号：US16379721

申请日：2019-04-09

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Hung Chih CHIANG ,  Cheng Yi CHANG ,  Ting Wei CHANG ,  Chi Shen CHANG

IPC: G01B9/02

Abstract: An automatic calibration optical interferometer comprises: a light source; an optical interference assembly, which divides a low coherent light into a first and a second incident light; an optical sampling assembly, with a first end receiving the first incident light and a partially reflective window at the second end being configured to divide the first incident light into a first reflected light and a first penetrating light configured to be emitted to the test sample; an optical reference assembly, with a reference mirror and an actuator, wherein the optical sampling assembly emits the second incident light to the reference mirror to generate a second reflected light, and the actuator moves the reference mirror; a polychromator, which outputs a displacement signal according to an optical path difference variation between the first and second reflected lights; and a displacement controller, which controls the actuator according to the displacement signal.