公开(公告)号：US20180095033A1

公开(公告)日：2018-04-05

申请号：US15723796

申请日：2017-10-03

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Ting-Wei CHANG ,  Yuan-Chin LEE ,  Chi-Shen CHANG ,  Hung-Chih CHIANG ,  Shuen-Chen CHEN

IPC: G01N21/45

Abstract: Provided is an interferometer for inspecting a test sample. The interferometer includes: a light source for providing a light beam; a beam splitting element, splitting the light beam into first and second incident light, wherein the first incident light is reflected by the test sample into first reflection light; a reflecting element, reflecting the second incident light into second reflection light; an optical detection element, receiving the first and the second reflection light into an interference signal; and a signal processing module, coupled to the optical detection element, for performing spatial differential calculation on the interference signal to generate a demodulation image of the test sample.