公开(公告)号：US20160341618A1

公开(公告)日：2016-11-24

申请号：US15036382

申请日：2013-11-14

Applicant: INFICON GMBH

Inventor： Felix MULLIS

IPC: G01L9/00

CPC classification number: G01L9/0072 ,  G01L23/08

Abstract: Method for processing a measurement signal (x) from a pressure measurement cell in order to generate an output signal (y) with the aid of a filter unit (10), wherein the method involves generating the output signal (y) with the aid of the filter unit (10) by at least reducing, preferably eliminating, a noise signal contained in the measurement signal (x), continuously determining a difference between the measurement signal (x) and the output signal (y), and changing a characteristic of the filter unit (10) as soon as the difference becomes greater than a threshold value, wherein the changed characteristic of the filter unit (10) remains as long as the difference becomes smaller than the threshold value, and wherein the changing of the filter characteristic involves decreasing the reduction in the noise signal present in the measurement signal (x).

Abstract translation: 用于处理来自压力测量单元的测量信号（x）的方法，用于借助于滤波器单元（10）产生输出信号（y），其中所述方法包括借助于产生输出信号（y），借助于 所述滤波器单元（10）至少减少（优选地）消除所述测量信号（x）中包含的噪声信号，连续地确定所述测量信号（x）和所述输出信号（y）之间的差异，并且改变所述滤波器单元 所述滤波器单元（10）一旦所述差值变得大于阈值，则所述滤波器单元（10）的改变的特性保持与所述差值变得小于所述阈值的长度，并且其中所述滤波器特性 涉及降低测量信号（x）中存在的噪声信号的减小。

公开(公告)号：US20150346044A1

公开(公告)日：2015-12-03

申请号：US14654771

申请日：2013-11-20

Applicant: INFICON GMBH

Inventor： Felix MULLIS ,  Martin WUEST

IPC: G01L9/00

CPC classification number: G01L9/0072 ,  G01L9/0045 ,  G01L9/0075 ,  G01L9/125 ,  G01L13/025 ,  G01L21/00

Abstract: Arrangement with capacitive pressure-measuring cell has a diaphragm for measuring vacuum pressure and a printed circuit board acting as a temperature sensor and another electronic component designed as a microchip that contains a digital signal processor with a temperature-to-digital converter and a capacitance-to-digital converter using a time measuring method. The converters determine temperature and capacitance of the cell in comparison to a reference resistor for temperature arranged on the printed circuit board and reference capacitor for capacitance for the pressure to be measured dependent on deformation of the diaphragm. A temperature-corrected pressure signal derived from the two measured signals uses correlation, the measured signals having been determined in advance from a calibration process, and the temperature-corrected pressure signal is provided as a pressure signal at the signal output for further processing. In this manner there is quick pressure measurement with high measuring accuracy.

Abstract translation: 具有电容式压力测量单元的布置具有用于测量真空压力的隔膜和用作温度传感器的印刷电路板，以及设计为包含具有温度 - 数字转换器的数字信号处理器和电容 - 使用时间测量方法的数模转换器。 与布置在印刷电路板上的温度的参考电阻器相比，转换器确定电池的温度和电容，并根据隔膜的变形测量​​要测量的压力的电容的参考电容。 从两个测量信号导出的温度校正压力信号使用相关性，从校准过程预先确定的测量信号和温度校正压力信号作为信号输出处的压力信号被提供用于进一步处理。 以这种方式，具有高测量精度的快速压力测量。