公开(公告)号：US20160025587A1

公开(公告)日：2016-01-28

申请号：US14773250

申请日：2013-07-09

Applicant: INFICON GMBH

Inventor： Bernhard ANDREAUS ,  Rolf ENDERES ,  Martin WUEST ,  Oskar UNTERMARZONER ,  Rudolf STOCKER

IPC: G01L21/34 ,  H01J41/06

CPC classification number: G01L21/34 ,  H01J41/06

Abstract: An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by a releasable plug connection (106).

Abstract translation: 电离真空测量池在测量室（107）中包括阳极（3A）和阴极（4K）。 测量室（107）布置在壳体（101）中，该壳体具有用于阴极（4K）的连接杆（104）朝向外部的真空密封馈通（103）。 测量室（107）将杆（104）保持在仅具有电绝缘性的馈通（109）中。 壳体（101）中的测量室（107）可以通过可释放的插头连接（106）来更换。

公开(公告)号：US20150346044A1

公开(公告)日：2015-12-03

申请号：US14654771

申请日：2013-11-20

Applicant: INFICON GMBH

Inventor： Felix MULLIS ,  Martin WUEST

IPC: G01L9/00

CPC classification number: G01L9/0072 ,  G01L9/0045 ,  G01L9/0075 ,  G01L9/125 ,  G01L13/025 ,  G01L21/00

Abstract: Arrangement with capacitive pressure-measuring cell has a diaphragm for measuring vacuum pressure and a printed circuit board acting as a temperature sensor and another electronic component designed as a microchip that contains a digital signal processor with a temperature-to-digital converter and a capacitance-to-digital converter using a time measuring method. The converters determine temperature and capacitance of the cell in comparison to a reference resistor for temperature arranged on the printed circuit board and reference capacitor for capacitance for the pressure to be measured dependent on deformation of the diaphragm. A temperature-corrected pressure signal derived from the two measured signals uses correlation, the measured signals having been determined in advance from a calibration process, and the temperature-corrected pressure signal is provided as a pressure signal at the signal output for further processing. In this manner there is quick pressure measurement with high measuring accuracy.

Abstract translation: 具有电容式压力测量单元的布置具有用于测量真空压力的隔膜和用作温度传感器的印刷电路板，以及设计为包含具有温度 - 数字转换器的数字信号处理器和电容 - 使用时间测量方法的数模转换器。 与布置在印刷电路板上的温度的参考电阻器相比，转换器确定电池的温度和电容，并根据隔膜的变形测量​​要测量的压力的电容的参考电容。 从两个测量信号导出的温度校正压力信号使用相关性，从校准过程预先确定的测量信号和温度校正压力信号作为信号输出处的压力信号被提供用于进一步处理。 以这种方式，具有高测量精度的快速压力测量。