公开(公告)号：US10082436B2

公开(公告)日：2018-09-25

申请号：US15036382

申请日：2013-11-14

Applicant: INFICON GMBH

Inventor： Felix Mullis

IPC: G01L9/00 ,  G01L23/08 ,  H03H21/00

CPC classification number: G01L9/0072 ,  G01L23/08

Abstract: Method for processing a measurement signal (x) from a pressure measurement cell in order to generate an output signal (y) with the aid of a filter unit (10), wherein the method involves generating the output signal (y) with the aid of the filter unit (10) by at least reducing, preferably eliminating, a noise signal contained in the measurement signal (x), continuously determining a difference between the measurement signal (x) and the output signal (y), and changing a characteristic of the filter unit (10) as soon as the difference becomes greater than a threshold value, wherein the changed characteristic of the filter unit (10) remains as long as the difference becomes smaller than the threshold value, and wherein the changing of the filter characteristic involves decreasing the reduction in the noise signal present in the measurement signal (x).

公开(公告)号：US09791339B2

公开(公告)日：2017-10-17

申请号：US14654771

申请日：2013-11-20

Applicant: INFICON GMBH

Inventor： Felix Mullis ,  Martin Wuest

IPC: G01L9/00 ,  G01L9/12 ,  G01L13/02 ,  G01L21/00

CPC classification number: G01L9/0072 ,  G01L9/0045 ,  G01L9/0075 ,  G01L9/125 ,  G01L13/025 ,  G01L21/00

Abstract: Arrangement with capacitive pressure-measuring cell has a diaphragm for measuring vacuum pressure and a printed circuit board acting as a temperature sensor and another electronic component designed as a microchip that contains a digital signal processor with a temperature-to-digital converter and a capacitance-to-digital converter using a time measuring method. The converters determine temperature and capacitance of the cell in comparison to a reference resistor for temperature arranged on the printed circuit board and reference capacitor for capacitance for the pressure to be measured dependent on deformation of the diaphragm. A temperature-corrected pressure signal derived from the two measured signals uses correlation, the measured signals having been determined in advance from a calibration process, and the temperature-corrected pressure signal is provided as a pressure signal at the signal output for further processing. In this manner there is quick pressure measurement with high measuring accuracy.