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公开(公告)号：US09791339B2
公开(公告)日：2017-10-17
申请号：US14654771
申请日：2013-11-20
Applicant: INFICON GMBH
Inventor： Felix Mullis , Martin Wuest
CPC classification number: G01L9/0072 , G01L9/0045 , G01L9/0075 , G01L9/125 , G01L13/025 , G01L21/00
Abstract: Arrangement with capacitive pressure-measuring cell has a diaphragm for measuring vacuum pressure and a printed circuit board acting as a temperature sensor and another electronic component designed as a microchip that contains a digital signal processor with a temperature-to-digital converter and a capacitance-to-digital converter using a time measuring method. The converters determine temperature and capacitance of the cell in comparison to a reference resistor for temperature arranged on the printed circuit board and reference capacitor for capacitance for the pressure to be measured dependent on deformation of the diaphragm. A temperature-corrected pressure signal derived from the two measured signals uses correlation, the measured signals having been determined in advance from a calibration process, and the temperature-corrected pressure signal is provided as a pressure signal at the signal output for further processing. In this manner there is quick pressure measurement with high measuring accuracy.
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公开(公告)号：US09945749B2
公开(公告)日：2018-04-17
申请号：US14773250
申请日：2013-07-09
Applicant: INFICON GMBH
Inventor： Bernhard Andreaus , Rolf Enderes , Martin Wuest , Oskar Untermarzoner , Rudolf Stocker
Abstract: An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by a releasable plug connection (106).
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