Abstract:
A method and system for imaging a target scene using a microbolometer array having multiple lines of microbolometer pixels are disclosed. Each line is switchable between an exposed state and a shielded state, where the line is exposed to the target scene and a reference scene, respectively. The method may include alternating between generating a target frame of the target scene and generating a reference frame of the reference scene, each of which in a rolling shutter mode. The method may also include, concurrently with the generating steps, alternating between sequentially shielding each line after its readout in the exposed state for its next readout in the shielded state, and sequentially exposing each line after its readout in the shielded state for its next readout in the exposed state. The method may also include adjusting the target frames using the reference frames to generate thermal images of the target scene.
Abstract:
The infrared scene projector has a support structure having an airtight chamber; an image projector secured to the support structure; a conversion chip having a substrate secured to the support structure, and an array of conversion units received on a face of the substrate, the array of conversion units being enclosed inside the airtight chamber and being optically coupled to the image projector, each one of the conversion units having at least one supporting post secured to the face of the substrate and a suspended platform held spaced apart from the face of the substrate by the at least one supporting post, the conversion chip being adapted to convert at least one of visible and near-infrared light received from the image projector into infrared radiation; and an infrared beam path extending away from the array of conversion units.
Abstract:
A heat-loss pressure microsensor for measuring a gas pressure is disclosed that includes a plurality of pressure gauges arranged proximate to one another on a substrate. The gauges may include a pair of gauges, each gauge including a thermistor having an electrical resistance that varies with its temperature, the thermistor's temperature being responsive to the gas pressure, a platform to receive the thermistor, and a support structure to hold the platform above the substrate. Each gauge may be configured to produce a gauge output signal related to the electrical resistance of its thermistor. The two gauges are configured with their platforms having equal nominal perimeters and different nominal surface areas, and their support structures having the same nominal geometry. A differential signal may be obtained from the two gauge output signals. The differential signal conveys information about the gas pressure and exhibits reduced sensitivity to fabrication-related dimensional variations.
Abstract:
The infrared scene projector has a support structure having an airtight chamber; an image projector secured to the support structure; a conversion chip having a substrate secured to the support structure, and an array of conversion units received on a face of the substrate, the array of conversion units being enclosed inside the airtight chamber and being optically coupled to the image projector, each one of the conversion units having at least one supporting post secured to the face of the substrate and a suspended platform held spaced apart from the face of the substrate by the at least one supporting post, the conversion chip being adapted to convert at least one of visible and near-infrared light received from the image projector into infrared radiation; and an infrared beam path extending away from the array of conversion units.
Abstract:
A microbolometer detector has an improved support structure. The microbolometer detector includes a substrate and a support structure including at least one post connected to and projecting substantially vertically from the substrate. The microbolometer detector also includes a platform held above the substrate and including a central region substantially vertically aligned with the at least one post of the support structure and a peripheral region surrounding the central region, the platform being supported by the support structure from the central region thereof. The microbolometer further includes at least one thermistor located in the peripheral region of the platform. A microbolometer focal plane array may also include multiple microbolometer detectors arranged in a two-dimensional array. The support structures are particularly well suited for supporting relatively large platforms of microbolometer detectors, particularly for far-infrared and terahertz detection and spectroscopy applications.