公开(公告)号：US12085463B2

公开(公告)日：2024-09-10

申请号：US17282889

申请日：2020-07-29

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Toshiaki Hirano ,  Kenichi Kakita ,  Hideji Kawarazaki ,  Masafumi Okawa ,  Shinya Kojima ,  Masahiro Kagimoto

IPC: G01L11/00 ,  B65D81/38 ,  G01N25/18 ,  H04Q9/00

CPC classification number: G01L11/002 ,  B65D81/38 ,  G01N25/18 ,  H04Q9/00 ,  B65D81/3813 ,  H04Q2209/886

Abstract: A vacuum insulator (10) includes: a core (13); a pressure sensor (51) that detects a pressure; a transmitter (52) that transmits, by wireless communication, the detected pressure detected by the pressure sensor (51); a power feeder (53) that feeds electric power to the pressure sensor (51) and the transmitter (52); and an outer skin (14), an inside of which is decompressed, the outer skin (14) accommodating therein the core (13), the pressure sensor (51), the transmitter (52), and the power feeder (53), the outer skin (14) having gas barrier capability.

公开(公告)号：US11747231B2

公开(公告)日：2023-09-05

申请号：US17905813

申请日：2020-04-08

Applicant: INSTITUT NATIONAL D'OPTIQUE

Inventor： Bruno Tremblay ,  Alex Paquet

IPC: G01L11/00 ,  G01L27/00 ,  G01K7/22

CPC classification number: G01L11/002 ,  G01L27/002 ,  G01K7/22

Abstract: A heat-loss pressure microsensor for measuring a gas pressure is disclosed that includes a plurality of pressure gauges arranged proximate to one another on a substrate. The gauges may include a pair of gauges, each gauge including a thermistor having an electrical resistance that varies with its temperature, the thermistor's temperature being responsive to the gas pressure, a platform to receive the thermistor, and a support structure to hold the platform above the substrate. Each gauge may be configured to produce a gauge output signal related to the electrical resistance of its thermistor. The two gauges are configured with their platforms having equal nominal perimeters and different nominal surface areas, and their support structures having the same nominal geometry. A differential signal may be obtained from the two gauge output signals. The differential signal conveys information about the gas pressure and exhibits reduced sensitivity to fabrication-related dimensional variations.

公开(公告)号：US20180202884A1

公开(公告)日：2018-07-19

申请号：US15743678

申请日：2016-07-12

Applicant: Todos Technologies Ltd. ,  TECHNION RESEARCH AND DEVELOPMENT FOUNDATION LTD.

Inventor： Yael Nemirovsky

IPC: G01L11/00

CPC classification number: G01L11/002 ,  G01L21/12 ,  G01N27/4077

Abstract: A pressure sensing device that includes a pressure sensing element that is of microscopic scale and has a pressure level dependent thermal parameter; a signal source that is configured to supply an input electrical signal to the pressure sensing element; and a monitor that is configured to (a) measure electrical output signals generated by the pressure sensing element as a result of the supply of the input electrical signal and (b) estimate a pressure level applied on the pressure sensing element based on the electrical output signals.

公开(公告)号：US07613586B2

公开(公告)日：2009-11-03

申请号：US11623561

申请日：2007-01-16

Applicant: Robert E. Higashi

Inventor： Robert E. Higashi

IPC: G01L7/00

CPC classification number: G01L21/10 ,  G01L11/002

Abstract: A system for determining a gas pressure or gauging a vacuum in a hermetically sealed enclosure. One or more heater structures and one or more temperature sensor structures situated on a substrate may be used in conjunction for measuring a thermal conductivity of a gas in the enclosure. Each heater has significant thermal isolation from each sensor structure. Electronics connected to each heater and sensor of their respective structures may provide processing to calculate the pressure or vacuum in the enclosure. The enclosure may contain various electronic components such as bolometers.

Abstract translation: 用于确定气体压力或在气密密封的外壳中测量真空的系统。 位于基板上的一个或多个加热器结构和一个或多个温度传感器结构可以结合用于测量外壳中的气体的导热性。 每个加热器具有与每个传感器结构相当的热隔离。 连接到每个加热器和各自结构的传感器的电子器件可提供计算外壳中的压力或真空度的处理。 外壳可能包含各种电子部件，如辐射热计。

公开(公告)号：US07249516B2

公开(公告)日：2007-07-31

申请号：US11146721

申请日：2005-06-07

Applicant: Michael D. Borenstein ,  Paul C. Arnold

Inventor： Michael D. Borenstein ,  Paul C. Arnold

IPC: G01L9/02

CPC classification number: G01L21/12 ,  G01L11/002

Abstract: In a resistively heated heat-loss pressure gauge, electrical current is switched between a sensing element and a compensating element at different duty cycles. As a result, the sensing element is heated relative to the compensating element. A fixed resistance is placed in series with at least the compensating element. The current source applies current to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element and the fixed resistive element.

Abstract translation: 在电阻加热的热损失压力表中，在不同的占空比下，在感测元件和补偿元件之间切换电流。 结果，感测元件相对于补偿元件被加热。 固定电阻与至少补偿元件串联放置。 电流源施加电流以将感测元件加热到感测元件的电阻与补偿元件和固定电阻元件的组合电阻相匹配的温度。

公开(公告)号：US06860153B2

公开(公告)日：2005-03-01

申请号：US09788437

申请日：2001-02-21

Applicant: Albert M. Leung

Inventor： Albert M. Leung

IPC: G01L11/00 ,  G01L21/10 ,  G01L19/04

CPC classification number: G01L21/10 ,  G01L11/002

Abstract: A thermal pressure sensor monitors pressure by measuring effects caused by variations of thermal conductivity between a member and a substrate to which the member is adhered by stiction. The interface between the member and the substrate behaves as an extremely narrow gap. In a preferred embodiment the member is a bridge extending between a pair of cantilever arms. Two pressure sensors may be combined in a Wheatstone bridge configuration. A method for fabricating a pressure sensor according to the invention comprises forming a layer of oxide on a substrate, depositing a layer of material on the oxide layer, forming the member from the layer of material, removing the oxide layer and then bringing the member into contact with the substrate. The portion of the substrate under the member may be patterned with plateaus and valleys.

Abstract translation: 热压传感器通过测量由构件与粘结构件所附着的基板之间的导热性变化而产生的影响来监测压力。 构件和衬底之间的界面表现为极窄的间隙。 在优选实施例中，构件是在一对悬臂之间延伸的桥。 两个压力传感器可以组合在惠斯通电桥配置中。 根据本发明的制造压力传感器的方法包括在衬底上形成氧化物层，在氧化物层上沉积材料层，从材料层形成构件，除去氧化物层，然后使构件进入 与基板接触。 该部件下面的基底部分可以形成平坦的和谷底。

公开(公告)号：US06619130B1

公开(公告)日：2003-09-16

申请号：US10148809

申请日：2002-06-05

Applicant: Naoki Yutani ,  Hiroshi Ohji ,  Kazuhiko Tsutsumi

Inventor： Naoki Yutani ,  Hiroshi Ohji ,  Kazuhiko Tsutsumi

IPC: G01L1302

CPC classification number: G01L11/002

Abstract: A pressure sensor includes a first diaphragm having a first surface receiving pressure, a first thermal detection section located opposite a central section of the first diaphragm, and a second thermal detection section having little displacement by pressure, and located opposite the first diaphragm The pressure sensor amplifies and outputs a difference between the first thermal detection section for pressure measurement and the second thermal detection section for reference output. Since the diaphragm to which the second thermal detection section is opposed is equal in thickness to the diaphragm to which the first thermal detection section is opposed, pressure can be accurately measured relative to a sudden change in atmospheric temperature.

Abstract translation: 压力传感器包括具有第一表面接收压力的第一隔膜，与第一隔膜的中心部分相对的第一热检测部分和具有几乎没有压力位移并且位于第一隔膜相对的第二热检测部分。压力传感器 放大并输出用于压力测量的第一热检测部和用于参考输出的第二热检测部之间的差。 由于第二热检测部相对的隔膜的厚度与第一热检测部相对的隔膜的厚度相等，因此能够相对于大气温度的突然变化来精确地测量压力。

公开(公告)号：US2852939A

公开(公告)日：1958-09-23

申请号：US53954655

申请日：1955-10-10

Applicant: CALIFORNIA INST RES FOUND

Inventor： BALOGA PAUL E

IPC: G01L7/18 ,  G01L11/00

CPC classification number: G01L7/18 ,  G01L11/002

公开(公告)号：US2832219A

公开(公告)日：1958-04-29

申请号：US51273855

申请日：1955-06-02

Applicant: VICTORY ENGINEERING CORP

Inventor： MEYER SAPOFF ,  GOODYEAR ROBERT S

IPC: G01L11/00

CPC classification number: G01L11/002

公开(公告)号：US20140174175A1

公开(公告)日：2014-06-26

申请号：US14140314

申请日：2013-12-24

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jae-Woong CHUN ,  Jeong-Min PARK ,  Do-Hyoung CHUNG

IPC: G01C5/06

CPC classification number: G01C5/06 ,  G01C5/005 ,  G01L7/00 ,  G01L11/002 ,  H04B7/185 ,  H04M1/00

Abstract: An apparatus and a method for measuring an altitude of a terminal which can correct an altitude error according to temporal and spatial changes are provided. The apparatus includes an atmospheric pressure measuring unit for measuring an atmospheric pressure from a barometer included in the terminal, a position determiner for measuring position information of the terminal, and a controller for, when a reference atmospheric pressure reception period is not generated, predicting a current reference atmospheric pressure by using previously received reference atmospheric pressures and measuring a current altitude by using the predicted reference atmospheric pressure and the measured atmospheric pressure.

Abstract translation: 提供了一种用于测量可以根据时间和空间变化校正高度误差的终端的高度的装置和方法。 该装置包括用于测量包括在终端中的气压计的大气压的大气压力测量单元，用于测量终端的位置信息的位置确定器，以及用于当没有产生参考大气压接收周期时的控制器， 通过使用先前接收到的参考大气压力并通过使用预测的参考大气压力和测量的大气压力来测量当前高度，来确定当前参考大气压。