公开(公告)号：US09910270B2

公开(公告)日：2018-03-06

申请号：US14977457

申请日：2015-12-21

Applicant: INTEL CORPORATION

Inventor： Julien Gamet ,  Alexandre Fotinos ,  Nicholas Abele

IPC: G02B26/10 ,  G02B26/08

CPC classification number: G02B26/105 ,  G02B26/085 ,  G02B26/101

Abstract: Electro-mechanical designs for MEMS scanning mirrors are described. In various embodiments, a driving coil may be situated on a reflective portion of a MEMS mirror. In some embodiments, a sensing coil may be situated partially or entirely on an outer frame portion of the MEMS mirror. Other embodiments are described and claimed.