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公开(公告)号：US3269836A
公开(公告)日：1966-08-30
申请号：US22422162
申请日：1962-09-17
Applicant: INTERCHEM CORP
Inventor： GREUBEL PAUL W , ILLARI FRANK A
CPC classification number: G03F7/04 , G03F7/0752
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